Imaging of in- and out-of-plane vibrations in micromechanical resonator

O. Holmgren (Corresponding Author), K. Kokkonen, Tomi Mattila, Ville Kaajakari, Aarne Oja, Jyrki Kiihamäki, J.V. Knuuttila, M.M. Salomaa

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Abstract

Vibrations in a micromechanical 13.1 MHz bulk acoustic mode silicon resonator have been imaged with a scanning Michelson laser interferometer. A novel detection scheme utilizing the Michelson interferometer is developed, which enables imaging the in-plane vibrations in addition to the out-of-plane component. The novel imaging technique is demonstrated by measuring the vibrations of the extensional and Lame modes in a square plate resonator
Original languageEnglish
Pages (from-to)121 - 122
Number of pages2
JournalElectronics Letters
Volume41
Issue number3
DOIs
Publication statusPublished - 2005
MoE publication typeA1 Journal article-refereed

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Holmgren, O., Kokkonen, K., Mattila, T., Kaajakari, V., Oja, A., Kiihamäki, J., Knuuttila, J. V., & Salomaa, M. M. (2005). Imaging of in- and out-of-plane vibrations in micromechanical resonator. Electronics Letters, 41(3), 121 - 122. https://doi.org/10.1049/el:20057018