Imaging of in- and out-of-plane vibrations in micromechanical resonator

O. Holmgren (Corresponding Author), K. Kokkonen, Tomi Mattila, Ville Kaajakari, Aarne Oja, Jyrki Kiihamäki, J.V. Knuuttila, M.M. Salomaa

Research output: Contribution to journalArticleScientificpeer-review

17 Citations (Scopus)

Abstract

Vibrations in a micromechanical 13.1 MHz bulk acoustic mode silicon resonator have been imaged with a scanning Michelson laser interferometer. A novel detection scheme utilizing the Michelson interferometer is developed, which enables imaging the in-plane vibrations in addition to the out-of-plane component. The novel imaging technique is demonstrated by measuring the vibrations of the extensional and Lame modes in a square plate resonator
Original languageEnglish
Pages (from-to)121 - 122
Number of pages2
JournalElectronics Letters
Volume41
Issue number3
DOIs
Publication statusPublished - 2005
MoE publication typeA1 Journal article-refereed

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Micromechanical resonators
Resonators
Imaging techniques
Michelson interferometers
Interferometers
Scanning
Silicon
Lasers

Cite this

Holmgren, O. ; Kokkonen, K. ; Mattila, Tomi ; Kaajakari, Ville ; Oja, Aarne ; Kiihamäki, Jyrki ; Knuuttila, J.V. ; Salomaa, M.M. / Imaging of in- and out-of-plane vibrations in micromechanical resonator. In: Electronics Letters. 2005 ; Vol. 41, No. 3. pp. 121 - 122.
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title = "Imaging of in- and out-of-plane vibrations in micromechanical resonator",
abstract = "Vibrations in a micromechanical 13.1 MHz bulk acoustic mode silicon resonator have been imaged with a scanning Michelson laser interferometer. A novel detection scheme utilizing the Michelson interferometer is developed, which enables imaging the in-plane vibrations in addition to the out-of-plane component. The novel imaging technique is demonstrated by measuring the vibrations of the extensional and Lame modes in a square plate resonator",
author = "O. Holmgren and K. Kokkonen and Tomi Mattila and Ville Kaajakari and Aarne Oja and Jyrki Kiiham{\"a}ki and J.V. Knuuttila and M.M. Salomaa",
year = "2005",
doi = "10.1049/el:20057018",
language = "English",
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Holmgren, O, Kokkonen, K, Mattila, T, Kaajakari, V, Oja, A, Kiihamäki, J, Knuuttila, JV & Salomaa, MM 2005, 'Imaging of in- and out-of-plane vibrations in micromechanical resonator', Electronics Letters, vol. 41, no. 3, pp. 121 - 122. https://doi.org/10.1049/el:20057018

Imaging of in- and out-of-plane vibrations in micromechanical resonator. / Holmgren, O. (Corresponding Author); Kokkonen, K.; Mattila, Tomi; Kaajakari, Ville; Oja, Aarne; Kiihamäki, Jyrki; Knuuttila, J.V.; Salomaa, M.M.

In: Electronics Letters, Vol. 41, No. 3, 2005, p. 121 - 122.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Imaging of in- and out-of-plane vibrations in micromechanical resonator

AU - Holmgren, O.

AU - Kokkonen, K.

AU - Mattila, Tomi

AU - Kaajakari, Ville

AU - Oja, Aarne

AU - Kiihamäki, Jyrki

AU - Knuuttila, J.V.

AU - Salomaa, M.M.

PY - 2005

Y1 - 2005

N2 - Vibrations in a micromechanical 13.1 MHz bulk acoustic mode silicon resonator have been imaged with a scanning Michelson laser interferometer. A novel detection scheme utilizing the Michelson interferometer is developed, which enables imaging the in-plane vibrations in addition to the out-of-plane component. The novel imaging technique is demonstrated by measuring the vibrations of the extensional and Lame modes in a square plate resonator

AB - Vibrations in a micromechanical 13.1 MHz bulk acoustic mode silicon resonator have been imaged with a scanning Michelson laser interferometer. A novel detection scheme utilizing the Michelson interferometer is developed, which enables imaging the in-plane vibrations in addition to the out-of-plane component. The novel imaging technique is demonstrated by measuring the vibrations of the extensional and Lame modes in a square plate resonator

U2 - 10.1049/el:20057018

DO - 10.1049/el:20057018

M3 - Article

VL - 41

SP - 121

EP - 122

JO - Electronics Letters

JF - Electronics Letters

SN - 0013-5194

IS - 3

ER -