Imaging of in- and out-of-plane vibrations in micromechanical resonator

O. Holmgren (Corresponding Author), K. Kokkonen, Tomi Mattila, Ville Kaajakari, Aarne Oja, Jyrki Kiihamäki, J.V. Knuuttila, M.M. Salomaa

Research output: Contribution to journalArticleScientificpeer-review

17 Citations (Scopus)


Vibrations in a micromechanical 13.1 MHz bulk acoustic mode silicon resonator have been imaged with a scanning Michelson laser interferometer. A novel detection scheme utilizing the Michelson interferometer is developed, which enables imaging the in-plane vibrations in addition to the out-of-plane component. The novel imaging technique is demonstrated by measuring the vibrations of the extensional and Lame modes in a square plate resonator
Original languageEnglish
Pages (from-to)121 - 122
Number of pages2
JournalElectronics Letters
Issue number3
Publication statusPublished - 2005
MoE publication typeA1 Journal article-refereed

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