Imaging of in- and out-of-plane vibrations in micromechanical resonator

O. Holmgren; K. Kokkonen; Tomi Mattila; Ville Kaajakari; Aarne Oja; Jyrki Kiihamäki; J.V. Knuuttila; M.M. Salomaa

doi:10.1049/el:20057018

Imaging of in- and out-of-plane vibrations in micromechanical resonator

O. Holmgren^*, K. Kokkonen, Tomi Mattila, Ville Kaajakari, Aarne Oja, Jyrki Kiihamäki, J.V. Knuuttila, M.M. Salomaa

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

17 Citations (Scopus)

Abstract

Vibrations in a micromechanical 13.1 MHz bulk acoustic mode silicon resonator have been imaged with a scanning Michelson laser interferometer. A novel detection scheme utilizing the Michelson interferometer is developed, which enables imaging the in-plane vibrations in addition to the out-of-plane component. The novel imaging technique is demonstrated by measuring the vibrations of the extensional and Lame modes in a square plate resonator

Original language	English
Pages (from-to)	121-122
Journal	Electronics Letters
Volume	41
Issue number	3
DOIs	https://doi.org/10.1049/el:20057018
Publication status	Published - 2005
MoE publication type	A1 Journal article-refereed

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title = "Imaging of in- and out-of-plane vibrations in micromechanical resonator",

abstract = "Vibrations in a micromechanical 13.1 MHz bulk acoustic mode silicon resonator have been imaged with a scanning Michelson laser interferometer. A novel detection scheme utilizing the Michelson interferometer is developed, which enables imaging the in-plane vibrations in addition to the out-of-plane component. The novel imaging technique is demonstrated by measuring the vibrations of the extensional and Lame modes in a square plate resonator",

author = "O. Holmgren and K. Kokkonen and Tomi Mattila and Ville Kaajakari and Aarne Oja and Jyrki Kiiham{\"a}ki and J.V. Knuuttila and M.M. Salomaa",

year = "2005",

doi = "10.1049/el:20057018",

language = "English",

volume = "41",

pages = "121--122",

journal = "Electronics Letters",

issn = "0013-5194",

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TY - JOUR

T1 - Imaging of in- and out-of-plane vibrations in micromechanical resonator

AU - Holmgren, O.

AU - Kokkonen, K.

AU - Mattila, Tomi

AU - Kaajakari, Ville

AU - Oja, Aarne

AU - Kiihamäki, Jyrki

AU - Knuuttila, J.V.

AU - Salomaa, M.M.

PY - 2005

Y1 - 2005

N2 - Vibrations in a micromechanical 13.1 MHz bulk acoustic mode silicon resonator have been imaged with a scanning Michelson laser interferometer. A novel detection scheme utilizing the Michelson interferometer is developed, which enables imaging the in-plane vibrations in addition to the out-of-plane component. The novel imaging technique is demonstrated by measuring the vibrations of the extensional and Lame modes in a square plate resonator

AB - Vibrations in a micromechanical 13.1 MHz bulk acoustic mode silicon resonator have been imaged with a scanning Michelson laser interferometer. A novel detection scheme utilizing the Michelson interferometer is developed, which enables imaging the in-plane vibrations in addition to the out-of-plane component. The novel imaging technique is demonstrated by measuring the vibrations of the extensional and Lame modes in a square plate resonator

U2 - 10.1049/el:20057018

DO - 10.1049/el:20057018

M3 - Article

SN - 0013-5194

VL - 41

SP - 121

EP - 122

JO - Electronics Letters

JF - Electronics Letters

IS - 3

ER -

Imaging of in- and out-of-plane vibrations in micromechanical resonator

Abstract

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