Impact of Fabrication Process Tolerances on Characteristics of Sub-THz Silicon Micromachined Filters

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

We demonstrate sub-THz waveguides, low-pass and band-pass micromachined filters at frequency range 225–325 GHz. Impact of fabrication processes and electrical interfaces with external waveguides on parameters of filters are studied and analyzed. Results obtained are applicable also for other types of devices based on micromachining waveguides.
Original languageEnglish
Title of host publicationProceedings of the 48th European Microwave Conference
Place of PublicationMadrid, Spain
PublisherInstitute of Electrical and Electronic Engineers IEEE
Pages284-287
Number of pages4
ISBN (Electronic)978-2-87487-051-4
DOIs
Publication statusPublished - 25 Sep 2018
MoE publication typeNot Eligible
Event48th European Microwave Conference, EuMC 2018 - Madrid, Spain
Duration: 23 Sep 201827 Sep 2018

Conference

Conference48th European Microwave Conference, EuMC 2018
Abbreviated titleEuMC
CountrySpain
CityMadrid
Period23/09/1827/09/18

Fingerprint

Waveguides
waveguides
filters
Fabrication
Silicon
fabrication
silicon
Micromachining
micromachining
Bandpass filters
bandpass filters
frequency ranges

Cite this

Lamminen, A., Saarilahti, J., Pursula, P., Kantanen, M., & Ermolov, V. (2018). Impact of Fabrication Process Tolerances on Characteristics of Sub-THz Silicon Micromachined Filters. In Proceedings of the 48th European Microwave Conference (pp. 284-287). [8541742] Madrid, Spain: Institute of Electrical and Electronic Engineers IEEE. https://doi.org/10.23919/EuMC.2018.8541742
Lamminen, Antti ; Saarilahti, Jaakko ; Pursula, Pekka ; Kantanen, Mikko ; Ermolov, Vladimir. / Impact of Fabrication Process Tolerances on Characteristics of Sub-THz Silicon Micromachined Filters. Proceedings of the 48th European Microwave Conference. Madrid, Spain : Institute of Electrical and Electronic Engineers IEEE, 2018. pp. 284-287
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abstract = "We demonstrate sub-THz waveguides, low-pass and band-pass micromachined filters at frequency range 225–325 GHz. Impact of fabrication processes and electrical interfaces with external waveguides on parameters of filters are studied and analyzed. Results obtained are applicable also for other types of devices based on micromachining waveguides.",
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Lamminen, A, Saarilahti, J, Pursula, P, Kantanen, M & Ermolov, V 2018, Impact of Fabrication Process Tolerances on Characteristics of Sub-THz Silicon Micromachined Filters. in Proceedings of the 48th European Microwave Conference., 8541742, Institute of Electrical and Electronic Engineers IEEE, Madrid, Spain, pp. 284-287, 48th European Microwave Conference, EuMC 2018, Madrid, Spain, 23/09/18. https://doi.org/10.23919/EuMC.2018.8541742

Impact of Fabrication Process Tolerances on Characteristics of Sub-THz Silicon Micromachined Filters. / Lamminen, Antti; Saarilahti, Jaakko; Pursula, Pekka; Kantanen, Mikko; Ermolov, Vladimir.

Proceedings of the 48th European Microwave Conference. Madrid, Spain : Institute of Electrical and Electronic Engineers IEEE, 2018. p. 284-287 8541742.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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Lamminen A, Saarilahti J, Pursula P, Kantanen M, Ermolov V. Impact of Fabrication Process Tolerances on Characteristics of Sub-THz Silicon Micromachined Filters. In Proceedings of the 48th European Microwave Conference. Madrid, Spain: Institute of Electrical and Electronic Engineers IEEE. 2018. p. 284-287. 8541742 https://doi.org/10.23919/EuMC.2018.8541742