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Impact of Fabrication Process Tolerances on Characteristics of Sub-THz Silicon Micromachined Filters
- Antti Lamminen
- , Jaakko Saarilahti
- , Pekka Pursula
- , Mikko Kantanen
- , Vladimir Ermolov
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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