Impact of Fabrication Process Tolerances on Characteristics of Sub-THz Silicon Micromachined Filters

Antti Lamminen, Jaakko Saarilahti, Pekka Pursula, Mikko Kantanen, Vladimir Ermolov

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    2 Citations (Scopus)

    Search results