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Impact of Fabrication Process Tolerances on Characteristics of Sub-THz Silicon Micromachined Filters
Antti Lamminen, Jaakko Saarilahti, Pekka Pursula, Mikko Kantanen, Vladimir Ermolov
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
2
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(Scopus)