Implications of stamp layout for large area NIL processing

H. Schulz; M. Wissen; H.C. Scheer; Jouni Ahopelto; Tomi Haatainen

Implications of stamp layout for large area NIL processing

H. Schulz, M. Wissen, H.C. Scheer, Jouni Ahopelto, Tomi Haatainen

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	Proceedings of the First International Conference on Nanoimprint Nanoprint, NNT Conference,San Francisco,CA,11-13 Dec 2002
Place of Publication	San Francisco
Publisher	Naval Research Laboratory
Pages	64-65
Publication status	Published - 2002
MoE publication type	Not Eligible
Event	1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 - San Francisco, United States Duration: 11 Dec 2002 → 13 Dec 2002 http://www.nntconf.org/pdf/2002ProgramSchedule.pdf (Conference Programme)

Conference

Conference	1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02
Abbreviated title	NNT 2002
Country/Territory	United States
City	San Francisco
Period	11/12/02 → 13/12/02
Internet address	http://www.nntconf.org/pdf/2002ProgramSchedule.pdf (Conference Programme)

Keywords

Nanoimprint Lithography

Cite this

@inbook{b842602bf7094a91913e8857e94465bb,

title = "Implications of stamp layout for large area NIL processing",

keywords = "Nanoimprint Lithography",

author = "H. Schulz and M. Wissen and H.C. Scheer and Jouni Ahopelto and Tomi Haatainen",

year = "2002",

language = "English",

pages = "64--65",

booktitle = "Proceedings of the First International Conference on Nanoimprint Nanoprint, NNT Conference,San Francisco,CA,11-13 Dec 2002",

publisher = "Naval Research Laboratory",

address = "United States",

note = "1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 , NNT 2002 ; Conference date: 11-12-2002 Through 13-12-2002",

url = "http://www.nntconf.org/pdf/2002ProgramSchedule.pdf",

}

Schulz, H, Wissen, M, Scheer, HC, Ahopelto, J & Haatainen, T 2002, Implications of stamp layout for large area NIL processing. in Proceedings of the First International Conference on Nanoimprint Nanoprint, NNT Conference,San Francisco,CA,11-13 Dec 2002. Naval Research Laboratory, San Francisco, pp. 64-65, 1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 , San Francisco, United States, 11/12/02.

Implications of stamp layout for large area NIL processing. / Schulz, H.; Wissen, M.; Scheer, H.C. et al.
Proceedings of the First International Conference on Nanoimprint Nanoprint, NNT Conference,San Francisco,CA,11-13 Dec 2002. San Francisco: Naval Research Laboratory, 2002. p. 64-65.

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

TY - CHAP

T1 - Implications of stamp layout for large area NIL processing

AU - Schulz, H.

AU - Wissen, M.

AU - Scheer, H.C.

AU - Ahopelto, Jouni

AU - Haatainen, Tomi

PY - 2002

Y1 - 2002

KW - Nanoimprint Lithography

M3 - Conference abstract in proceedings

SP - 64

EP - 65

BT - Proceedings of the First International Conference on Nanoimprint Nanoprint, NNT Conference,San Francisco,CA,11-13 Dec 2002

PB - Naval Research Laboratory

CY - San Francisco

T2 - 1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02

Y2 - 11 December 2002 through 13 December 2002

ER -