Abstract
Electrically tunable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. Producing interferometers with prior art processes includes costly and complicated production phases. Therefore, it has not been possible to apply interferometers in consumer mass products. According to the present solution, the Fabry-Perot cavity is made by removing a sacrificial layer (112) which has been polymer material. A mirror layer (113, 117-120) which is produced above the sacrificial layer can be made with atomic layer deposition technology, for example. According to a preferable embodiment, electrodes (106b, 115b) of the mirror structures are formed by using sputtering or evaporation. With the present solution it is possible to avoid the above mentioned problems related with prior art.
Patent family as of 17.12.2021
EP2394146 A1 20111214 EP20100735510 20100127
EP2394146 A4 20180103 EP20100735510 20100127
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| Original language | English |
|---|---|
| Patent number | US2020026063 |
| IPC | G02B 26/ 00 A I |
| Priority date | 29/07/19 |
| Publication status | Published - 23 Jan 2020 |
| MoE publication type | H1 Granted patent |