Improved electronic regulated Fabry-Perot interferometer, an average product, an electrode system and a method in order to produce one electronic regulated Fabry-Perot interferometer

Martti Blomberg (Inventor), Hannu Kattelus (Inventor), Riikka Puurunen (Inventor), Martti Blomberg (Inventor), Hannu Kattelus (Inventor), Riikka Puurunen (Inventor)

    Research output: Patent › Patent

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