Improved electronic regulated Fabry-Perot interferometer, an average product, an electrode system and a method in order to produce one electronic regulated Fabry-Perot interferometer
Martti Blomberg (Inventor)
, Hannu Kattelus (Inventor)
, Riikka Puurunen (Inventor)
, Martti Blomberg (Inventor)
, Hannu Kattelus (Inventor)
, Riikka Puurunen (Inventor)
Research output: Patent › Patent
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