Improved reproducibility in porous silica sol-gel processing using tertiary butanol solvent

Anna Rissanen, Martti Blomberg, Hannu Kattelus

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    Silica aerogels and xerogels are porous materials, which possess many exceptional properties. The research for the use of aerogel thin films in MEMS applications, such as humidity sensors, biosensors and calorimetric devices, is still at an early stage. Therefore the aerogel thin film process development is prerequisite. Previously, highly volatile liquids like ethanol or isopropanol (IPA) have been used for the solvent in the traditional two-step acid-base sol-gel process, which may deteriorate the reproducibility of the process. In this paper, a novel method to produce porous films with improved reproducibility is presented. It is also demonstrated that aerogel films act as a source for particles during the supercritical drying process. Aerogel patterning with lithography and plasma etching is investigated.
    Original languageEnglish
    Title of host publicationNSTI-Nanotech 2004: Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show
    Subtitle of host publicationBoston, USA, 7-11 March 2004
    Pages366-369
    Volume3
    Publication statusPublished - 2004
    MoE publication typeA4 Article in a conference publication

    Keywords

    • sol-gel
    • aerogel
    • xerogel
    • TBA
    • porous film patterning

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  • Cite this

    Rissanen, A., Blomberg, M., & Kattelus, H. (2004). Improved reproducibility in porous silica sol-gel processing using tertiary butanol solvent. In NSTI-Nanotech 2004: Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show: Boston, USA, 7-11 March 2004 (Vol. 3, pp. 366-369)