Improvement of SC-1 Bath Stability by Complexing Agents

Heini Saloniemi (Corresponding Author), Taru Visti, Simo Eränen, Arto Kiviranta, Olli Anttila

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    JournalPhysica Scripta
    Volume2002
    Issue numberT101
    DOIs
    Publication statusPublished - 2001
    MoE publication typeA1 Journal article-refereed
    Event19th Nordic Semiconductor Meeting, NSM19
    - Copenhagen, Denmark
    Duration: 20 May 200123 May 2001

    Cite this

    Saloniemi, H., Visti, T., Eränen, S., Kiviranta, A., & Anttila, O. (2001). Improvement of SC-1 Bath Stability by Complexing Agents. Physica Scripta, 2002(T101). https://doi.org/10.1238/Physica.Topical.101a00226
    Saloniemi, Heini ; Visti, Taru ; Eränen, Simo ; Kiviranta, Arto ; Anttila, Olli. / Improvement of SC-1 Bath Stability by Complexing Agents. In: Physica Scripta. 2001 ; Vol. 2002, No. T101.
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    Saloniemi, H, Visti, T, Eränen, S, Kiviranta, A & Anttila, O 2001, 'Improvement of SC-1 Bath Stability by Complexing Agents', Physica Scripta, vol. 2002, no. T101. https://doi.org/10.1238/Physica.Topical.101a00226

    Improvement of SC-1 Bath Stability by Complexing Agents. / Saloniemi, Heini (Corresponding Author); Visti, Taru; Eränen, Simo; Kiviranta, Arto; Anttila, Olli.

    In: Physica Scripta, Vol. 2002, No. T101, 2001.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Improvement of SC-1 Bath Stability by Complexing Agents

    AU - Saloniemi, Heini

    AU - Visti, Taru

    AU - Eränen, Simo

    AU - Kiviranta, Arto

    AU - Anttila, Olli

    N1 - CA2: ELE1 CA2: KET0 CA: ELE CA: KET PGN: 43 p.

    PY - 2001

    Y1 - 2001

    U2 - 10.1238/Physica.Topical.101a00226

    DO - 10.1238/Physica.Topical.101a00226

    M3 - Article

    VL - 2002

    JO - Physica Scripta

    JF - Physica Scripta

    SN - 0031-8949

    IS - T101

    ER -