Improvement of SC-1 Bath Stability by Complexing Agents

Heini Saloniemi (Corresponding Author), Taru Visti, Simo Eränen, Arto Kiviranta, Olli Anttila

    Research output: Contribution to journalArticleScientificpeer-review

    Abstract

    The improvement in SC-1 lifetime was studied by adding complexing agents: TEA, EDTA, CDTA, DTPA and DTPMP, to a bath, which was intentionally contaminated with a multimetal standard solution. The decomposition of hydrogen peroxide in the bath was monitored in situ by an optical analyzer. Adsorption of metals to wafers was analyzed by spinning cleaning solutions, containing metals and complexing agents, on wafers. Metal concentrations were measured by TXRF and GFAAS combined with VPD sample preparation.
    Original languageEnglish
    Pages (from-to)226-229
    JournalPhysica Scripta
    Volume2002
    Issue numberT101
    DOIs
    Publication statusPublished - 2002
    MoE publication typeA1 Journal article-refereed
    Event19th Nordic Semiconductor Meeting, NSM19
    - Copenhagen, Denmark
    Duration: 20 May 200123 May 2001

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