Improvement of SC-1 Bath Stability by Complexing Agents

Heini Saloniemi (Corresponding Author), Taru Visti, Simo Eränen, Arto Kiviranta, Olli Anttila

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    JournalPhysica Scripta
    Issue numberT101
    Publication statusPublished - 2001
    MoE publication typeA1 Journal article-refereed
    Event19th Nordic Semiconductor Meeting, NSM19
    - Copenhagen, Denmark
    Duration: 20 May 200123 May 2001

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