Improvement of SC-1 bath stability by complexing agents

Heini Saloniemi, Taru Visti, Simo Eränen, Arto Kiviranta, Olli Anttila

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

6 Citations (Scopus)

Original language	English
Title of host publication	Cleaning Technology in Semiconductor Device Manufacturing VII. San Francisco 2001
Publisher	Electrochemical Society ECS
Pages	329-336
ISBN (Print)	1-56677-359-8
Publication status	Published - 2002
MoE publication type	A4 Article in a conference publication

Keywords

@inproceedings{d5b13165743d4644911fb21cdd02a767,

title = "Improvement of SC-1 bath stability by complexing agents",

keywords = "SC-1, stability, complexing agent",

author = "Heini Saloniemi and Taru Visti and Simo Er{\"a}nen and Arto Kiviranta and Olli Anttila",

year = "2002",

language = "English",

isbn = "1-56677-359-8",

series = "ECS Proceedings Volumes",

publisher = "Electrochemical Society ECS",

pages = "329--336",

booktitle = "Cleaning Technology in Semiconductor Device Manufacturing VII. San Francisco 2001",

address = "United States",

}

Improvement of SC-1 bath stability by complexing agents. / Saloniemi, Heini; Visti, Taru; Eränen, Simo et al.
Cleaning Technology in Semiconductor Device Manufacturing VII. San Francisco 2001. Electrochemical Society ECS, 2002. p. 329-336 (ECS Proceedings Volumes, Vol. 2001-26).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Improvement of SC-1 bath stability by complexing agents

AU - Saloniemi, Heini

AU - Visti, Taru

AU - Eränen, Simo

AU - Kiviranta, Arto

AU - Anttila, Olli

PY - 2002

Y1 - 2002

KW - SC-1

KW - stability

KW - complexing agent

M3 - Conference article in proceedings

SN - 1-56677-359-8

T3 - ECS Proceedings Volumes

SP - 329

EP - 336

BT - Cleaning Technology in Semiconductor Device Manufacturing VII. San Francisco 2001

PB - Electrochemical Society ECS

ER -