Improvement of SC-1 bath stability by complexing agents

Heini Saloniemi, Taru Visti, Simo Eränen, Arto Kiviranta, Olli Anttila

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    5 Citations (Scopus)
    Original languageEnglish
    Title of host publicationCleaning Technology in Semiconductor Device Manufacturing VII. San Francisco 2001
    PublisherElectrochemical Society ECS
    Pages329-336
    ISBN (Print)1-56677-359-8
    Publication statusPublished - 2002
    MoE publication typeA4 Article in a conference publication

    Publication series

    SeriesECS Proceedings Volumes
    Volume2001-26
    ISSN2576-1579

    Keywords

    • SC-1
    • stability
    • complexing agent

    Cite this

    Saloniemi, H., Visti, T., Eränen, S., Kiviranta, A., & Anttila, O. (2002). Improvement of SC-1 bath stability by complexing agents. In Cleaning Technology in Semiconductor Device Manufacturing VII. San Francisco 2001 (pp. 329-336). Electrochemical Society ECS. ECS Proceedings Volumes, Vol.. 2001-26