In-line measurement of the surface texture of rolls using long slender piezoresistive microprobes

Linus Teir (Corresponding Author), Tuomas Lindstedt, Thomas Widmaier, Björn Hemming, Uwe Brand, Michael Fahrbach, Erwin Peiner, Antti Lassila

Research output: Contribution to journalArticleScientificpeer-review

14 Citations (Scopus)
44 Downloads (Pure)


Long slender piezoresistive silicon microprobes are a new type of sensor for measurement of surface roughness. Their advantage is the ability to measure at speeds of up to 15 mm/s, which is much faster than conventional stylus probes. The drawbacks are their small measurement range and tendency to break easily when deflected by more than the allowed range of 1 mm. In this article, previously developed microprobes were tested in the laboratory to evaluate their metrological prop-erties, then tested under industrial conditions. There are several industrial measurement applications in which microprobes are useful. Measurement of the roughness of paper machine rolls was selected for testing in this study. The integration of a microprobe into an existing roll measurement device is presented together with the measurement results. The results are promising, indicating that measurements using a microprobe can give useful data on the grinding process.

Original languageEnglish
Article number5955
Issue number17
Publication statusPublished - 5 Sept 2021
MoE publication typeA1 Journal article-refereed


  • High speed
  • Metrology
  • Paper machine roll
  • Roughness
  • Silicon microprobe


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