In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides

Mikko J. Heikkilä (Corresponding author), Kaupo Kukli, Elisa Atosuo, Oili Ylivaara, Riikka L. Puurunen, Mikko Ritala, Markku Leskelä

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Original languageEnglish
Title of host publicationSynchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop
Subtitle of host publicationBook of abstracts
Publication statusPublished - 2016
EventSynchrotron Radiation to study Atomic Layer Deposition, SR-ALD Workshop - Barcelona, Spain
Duration: 12 Jun 201615 Jun 2016

Workshop

WorkshopSynchrotron Radiation to study Atomic Layer Deposition, SR-ALD Workshop
CountrySpain
CityBarcelona
Period12/06/1615/06/16

Cite this

Heikkilä, M. J., Kukli, K., Atosuo, E., Ylivaara, O., Puurunen, R. L., Ritala, M., & Leskelä, M. (2016). In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides. In Synchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop: Book of abstracts
Heikkilä, Mikko J. ; Kukli, Kaupo ; Atosuo, Elisa ; Ylivaara, Oili ; Puurunen, Riikka L. ; Ritala, Mikko ; Leskelä, Markku. / In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides. Synchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop: Book of abstracts. 2016.
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author = "Heikkil{\"a}, {Mikko J.} and Kaupo Kukli and Elisa Atosuo and Oili Ylivaara and Puurunen, {Riikka L.} and Mikko Ritala and Markku Leskel{\"a}",
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Heikkilä, MJ, Kukli, K, Atosuo, E, Ylivaara, O, Puurunen, RL, Ritala, M & Leskelä, M 2016, In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides. in Synchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop: Book of abstracts. Synchrotron Radiation to study Atomic Layer Deposition, SR-ALD Workshop, Barcelona, Spain, 12/06/16.

In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides. / Heikkilä, Mikko J. (Corresponding author); Kukli, Kaupo; Atosuo, Elisa; Ylivaara, Oili; Puurunen, Riikka L.; Ritala, Mikko; Leskelä, Markku.

Synchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop: Book of abstracts. 2016.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

TY - CHAP

T1 - In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides

AU - Heikkilä, Mikko J.

AU - Kukli, Kaupo

AU - Atosuo, Elisa

AU - Ylivaara, Oili

AU - Puurunen, Riikka L.

AU - Ritala, Mikko

AU - Leskelä, Markku

N1 - Project 102086 ALDCoE

PY - 2016

Y1 - 2016

M3 - Conference abstract in proceedings

BT - Synchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop

ER -

Heikkilä MJ, Kukli K, Atosuo E, Ylivaara O, Puurunen RL, Ritala M et al. In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides. In Synchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop: Book of abstracts. 2016