In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides

Mikko J. Heikkilä (Corresponding author), Kaupo Kukli, Elisa Atosuo, Oili Ylivaara, Riikka L. Puurunen, Mikko Ritala, Markku Leskelä

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationSynchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop
    Subtitle of host publicationBook of abstracts
    Publication statusPublished - 2016
    EventSynchrotron Radiation to study Atomic Layer Deposition, SR-ALD Workshop - Barcelona, Spain
    Duration: 12 Jun 201615 Jun 2016

    Workshop

    WorkshopSynchrotron Radiation to study Atomic Layer Deposition, SR-ALD Workshop
    CountrySpain
    CityBarcelona
    Period12/06/1615/06/16

    Cite this

    Heikkilä, M. J., Kukli, K., Atosuo, E., Ylivaara, O., Puurunen, R. L., Ritala, M., & Leskelä, M. (2016). In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides. In Synchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop: Book of abstracts
    Heikkilä, Mikko J. ; Kukli, Kaupo ; Atosuo, Elisa ; Ylivaara, Oili ; Puurunen, Riikka L. ; Ritala, Mikko ; Leskelä, Markku. / In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides. Synchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop: Book of abstracts. 2016.
    @inbook{4ad9a44d06124600ad8e3210c1e4a193,
    title = "In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides",
    author = "Heikkil{\"a}, {Mikko J.} and Kaupo Kukli and Elisa Atosuo and Oili Ylivaara and Puurunen, {Riikka L.} and Mikko Ritala and Markku Leskel{\"a}",
    note = "Project 102086 ALDCoE",
    year = "2016",
    language = "English",
    booktitle = "Synchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop",

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    Heikkilä, MJ, Kukli, K, Atosuo, E, Ylivaara, O, Puurunen, RL, Ritala, M & Leskelä, M 2016, In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides. in Synchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop: Book of abstracts. Synchrotron Radiation to study Atomic Layer Deposition, SR-ALD Workshop, Barcelona, Spain, 12/06/16.

    In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides. / Heikkilä, Mikko J. (Corresponding author); Kukli, Kaupo; Atosuo, Elisa; Ylivaara, Oili; Puurunen, Riikka L.; Ritala, Mikko; Leskelä, Markku.

    Synchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop: Book of abstracts. 2016.

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    TY - CHAP

    T1 - In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides

    AU - Heikkilä, Mikko J.

    AU - Kukli, Kaupo

    AU - Atosuo, Elisa

    AU - Ylivaara, Oili

    AU - Puurunen, Riikka L.

    AU - Ritala, Mikko

    AU - Leskelä, Markku

    N1 - Project 102086 ALDCoE

    PY - 2016

    Y1 - 2016

    M3 - Conference abstract in proceedings

    BT - Synchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop

    ER -

    Heikkilä MJ, Kukli K, Atosuo E, Ylivaara O, Puurunen RL, Ritala M et al. In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides. In Synchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop: Book of abstracts. 2016