In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides

Mikko J. Heikkilä (Corresponding author), Kaupo Kukli, Elisa Atosuo, Oili Ylivaara, Riikka L. Puurunen, Mikko Ritala, Markku Leskelä

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationSynchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop
    Subtitle of host publicationBook of abstracts
    Publication statusPublished - 2016
    EventSynchrotron Radiation to study Atomic Layer Deposition, SR-ALD Workshop - Barcelona, Spain
    Duration: 12 Jun 201615 Jun 2016

    Workshop

    WorkshopSynchrotron Radiation to study Atomic Layer Deposition, SR-ALD Workshop
    CountrySpain
    CityBarcelona
    Period12/06/1615/06/16

    Cite this

    Heikkilä, M. J., Kukli, K., Atosuo, E., Ylivaara, O., Puurunen, R. L., Ritala, M., & Leskelä, M. (2016). In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides. In Synchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop: Book of abstracts https://indico.cells.es/indico/event/63/material/6/0.pdf