In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides

Mikko J. Heikkilä; Kaupo Kukli; Elisa Atosuo; Oili Ylivaara; Riikka L. Puurunen; Mikko Ritala; Markku Leskelä

In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides

Mikko J. Heikkilä^*
, Kaupo Kukli
, Elisa Atosuo
, Oili Ylivaara
, Riikka L. Puurunen
, Mikko Ritala
, Markku Leskelä

^*Corresponding author for this work

University of Helsinki
VTT (former employee or external)

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	Synchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop
Subtitle of host publication	Book of abstracts
Publication status	Published - 2016
MoE publication type	Not Eligible
Event	Synchrotron Radiation to study Atomic Layer Deposition, SR-ALD Workshop - Barcelona, Spain Duration: 12 Jun 2016 → 15 Jun 2016

Workshop

Workshop	Synchrotron Radiation to study Atomic Layer Deposition, SR-ALD Workshop
Country/Territory	Spain
City	Barcelona
Period	12/06/16 → 15/06/16

Access to Document

https://indico.cells.es/indico/event/63/material/6/0.pdf

Cite this

Heikkilä, M. J., Kukli, K., Atosuo, E., Ylivaara, O., Puurunen, R. L., Ritala, M., & Leskelä, M. (2016). In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides. In Synchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop: Book of abstracts https://indico.cells.es/indico/event/63/material/6/0.pdf

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title = "In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides",

author = "Heikkil{\"a}, \{Mikko J.\} and Kaupo Kukli and Elisa Atosuo and Oili Ylivaara and Puurunen, \{Riikka L.\} and Mikko Ritala and Markku Leskel{\"a}",

note = "Project 102086 ALDCoE; Synchrotron Radiation to study Atomic Layer Deposition, SR-ALD Workshop ; Conference date: 12-06-2016 Through 15-06-2016",

year = "2016",

language = "English",

booktitle = "Synchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop",

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Heikkilä, MJ, Kukli, K, Atosuo, E, Ylivaara, O, Puurunen, RL, Ritala, M & Leskelä, M 2016, In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides. in Synchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop: Book of abstracts. Synchrotron Radiation to study Atomic Layer Deposition, SR-ALD Workshop, Barcelona, Spain, 12/06/16. <https://indico.cells.es/indico/event/63/material/6/0.pdf>

In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides. / Heikkilä, Mikko J.; Kukli, Kaupo; Atosuo, Elisa et al.
Synchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop: Book of abstracts. 2016.

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

TY - CHAP

T1 - In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides

AU - Heikkilä, Mikko J.

AU - Kukli, Kaupo

AU - Atosuo, Elisa

AU - Ylivaara, Oili

AU - Puurunen, Riikka L.

AU - Ritala, Mikko

AU - Leskelä, Markku

N1 - Project 102086 ALDCoE

PY - 2016

Y1 - 2016

M3 - Conference abstract in proceedings

BT - Synchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop

T2 - Synchrotron Radiation to study Atomic Layer Deposition, SR-ALD Workshop

Y2 - 12 June 2016 through 15 June 2016

ER -