Fingerprint
Dive into the research topics of 'Inductively coupled plasma etching of amorphous Al2O3 and TiO2 mask layers grown by atomic layer deposition'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Inductively coupled plasma etching of amorphous Al2O3 and TiO2 mask layers grown by atomic layer deposition
James Dekker (Corresponding Author), Kai Kolari, Riikka Puurunen
Research output: Contribution to journal › Article › Scientific › peer-review
40
Citations
(Scopus)