Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3

Oili Ylivaara (Corresponding author), Xuwen Liu, Sakari Sintonen, Saima Ali, Jaakko Julin, Andreas Langner, Eero Haimi, Timo Sajavaara, Harri Lipsanen, Simo-Pekka Hannula, Riikka L. Puurunen

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Original languageEnglish
Title of host publication Technical Program & Abstracts
PublisherAmerican Vacuum Society AVS
Publication statusPublished - 2014
Event14th International Conference on Atomic Layer Deposition, ALD 2014 - Kyoto, Japan
Duration: 15 Jun 201418 Jun 2014
Conference number: 14

Conference

Conference14th International Conference on Atomic Layer Deposition, ALD 2014
Abbreviated titleALD 2014
CountryJapan
CityKyoto
Period15/06/1418/06/14

Cite this

Ylivaara, O., Liu, X., Sintonen, S., Ali, S., Julin, J., Langner, A., ... Puurunen, R. L. (2014). Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3. In Technical Program & Abstracts American Vacuum Society AVS.
Ylivaara, Oili ; Liu, Xuwen ; Sintonen, Sakari ; Ali, Saima ; Julin, Jaakko ; Langner, Andreas ; Haimi, Eero ; Sajavaara, Timo ; Lipsanen, Harri ; Hannula, Simo-Pekka ; Puurunen, Riikka L. / Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3. Technical Program & Abstracts. American Vacuum Society AVS, 2014.
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title = "Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3",
author = "Oili Ylivaara and Xuwen Liu and Sakari Sintonen and Saima Ali and Jaakko Julin and Andreas Langner and Eero Haimi and Timo Sajavaara and Harri Lipsanen and Simo-Pekka Hannula and Puurunen, {Riikka L.}",
note = "Published abstract of a poster Project 74717 MECHALD",
year = "2014",
language = "English",
booktitle = "Technical Program & Abstracts",
publisher = "American Vacuum Society AVS",
address = "United States",

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Ylivaara, O, Liu, X, Sintonen, S, Ali, S, Julin, J, Langner, A, Haimi, E, Sajavaara, T, Lipsanen, H, Hannula, S-P & Puurunen, RL 2014, Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3. in Technical Program & Abstracts. American Vacuum Society AVS, 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan, 15/06/14.

Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3. / Ylivaara, Oili (Corresponding author); Liu, Xuwen; Sintonen, Sakari; Ali, Saima; Julin, Jaakko; Langner, Andreas; Haimi, Eero; Sajavaara, Timo; Lipsanen, Harri; Hannula, Simo-Pekka; Puurunen, Riikka L.

Technical Program & Abstracts. American Vacuum Society AVS, 2014.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

TY - CHAP

T1 - Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3

AU - Ylivaara, Oili

AU - Liu, Xuwen

AU - Sintonen, Sakari

AU - Ali, Saima

AU - Julin, Jaakko

AU - Langner, Andreas

AU - Haimi, Eero

AU - Sajavaara, Timo

AU - Lipsanen, Harri

AU - Hannula, Simo-Pekka

AU - Puurunen, Riikka L.

N1 - Published abstract of a poster Project 74717 MECHALD

PY - 2014

Y1 - 2014

M3 - Conference abstract in proceedings

BT - Technical Program & Abstracts

PB - American Vacuum Society AVS

ER -

Ylivaara O, Liu X, Sintonen S, Ali S, Julin J, Langner A et al. Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3. In Technical Program & Abstracts. American Vacuum Society AVS. 2014