Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3

Oili Ylivaara (Corresponding author), Xuwen Liu, Sakari Sintonen, Saima Ali, Jaakko Julin, Andreas Langner, Eero Haimi, Timo Sajavaara, Harri Lipsanen, Simo-Pekka Hannula, Riikka L. Puurunen

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publication Technical Program & Abstracts
    PublisherAmerican Vacuum Society AVS
    Publication statusPublished - 2014
    Event14th International Conference on Atomic Layer Deposition, ALD 2014 - Kyoto, Japan
    Duration: 15 Jun 201418 Jun 2014
    Conference number: 14

    Conference

    Conference14th International Conference on Atomic Layer Deposition, ALD 2014
    Abbreviated titleALD 2014
    CountryJapan
    CityKyoto
    Period15/06/1418/06/14

    Cite this

    Ylivaara, O., Liu, X., Sintonen, S., Ali, S., Julin, J., Langner, A., Haimi, E., Sajavaara, T., Lipsanen, H., Hannula, S-P., & Puurunen, R. L. (2014). Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3. In Technical Program & Abstracts American Vacuum Society AVS.