Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3

Oili Ylivaara (Corresponding author), Xuwen Liu, Sakari Sintonen, Saima Ali, Jaakko Julin, Andreas Langner, Eero Haimi, Timo Sajavaara, Harri Lipsanen, Simo-Pekka Hannula, Riikka L. Puurunen

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publication Technical Program & Abstracts
    PublisherAmerican Vacuum Society AVS
    Publication statusPublished - 2014
    Event14th International Conference on Atomic Layer Deposition, ALD 2014 - Kyoto, Japan
    Duration: 15 Jun 201418 Jun 2014
    Conference number: 14

    Conference

    Conference14th International Conference on Atomic Layer Deposition, ALD 2014
    Abbreviated titleALD 2014
    CountryJapan
    CityKyoto
    Period15/06/1418/06/14

    Cite this

    Ylivaara, O., Liu, X., Sintonen, S., Ali, S., Julin, J., Langner, A., ... Puurunen, R. L. (2014). Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3. In Technical Program & Abstracts American Vacuum Society AVS.
    Ylivaara, Oili ; Liu, Xuwen ; Sintonen, Sakari ; Ali, Saima ; Julin, Jaakko ; Langner, Andreas ; Haimi, Eero ; Sajavaara, Timo ; Lipsanen, Harri ; Hannula, Simo-Pekka ; Puurunen, Riikka L. / Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3. Technical Program & Abstracts. American Vacuum Society AVS, 2014.
    @inbook{4e1dca778e104d1087f458f9f71c9a63,
    title = "Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3",
    author = "Oili Ylivaara and Xuwen Liu and Sakari Sintonen and Saima Ali and Jaakko Julin and Andreas Langner and Eero Haimi and Timo Sajavaara and Harri Lipsanen and Simo-Pekka Hannula and Puurunen, {Riikka L.}",
    note = "Published abstract of a poster Project 74717 MECHALD",
    year = "2014",
    language = "English",
    booktitle = "Technical Program & Abstracts",
    publisher = "American Vacuum Society AVS",
    address = "United States",

    }

    Ylivaara, O, Liu, X, Sintonen, S, Ali, S, Julin, J, Langner, A, Haimi, E, Sajavaara, T, Lipsanen, H, Hannula, S-P & Puurunen, RL 2014, Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3. in Technical Program & Abstracts. American Vacuum Society AVS, 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan, 15/06/14.

    Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3. / Ylivaara, Oili (Corresponding author); Liu, Xuwen; Sintonen, Sakari; Ali, Saima; Julin, Jaakko; Langner, Andreas; Haimi, Eero; Sajavaara, Timo; Lipsanen, Harri; Hannula, Simo-Pekka; Puurunen, Riikka L.

    Technical Program & Abstracts. American Vacuum Society AVS, 2014.

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    TY - CHAP

    T1 - Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3

    AU - Ylivaara, Oili

    AU - Liu, Xuwen

    AU - Sintonen, Sakari

    AU - Ali, Saima

    AU - Julin, Jaakko

    AU - Langner, Andreas

    AU - Haimi, Eero

    AU - Sajavaara, Timo

    AU - Lipsanen, Harri

    AU - Hannula, Simo-Pekka

    AU - Puurunen, Riikka L.

    N1 - Published abstract of a poster Project 74717 MECHALD

    PY - 2014

    Y1 - 2014

    M3 - Conference abstract in proceedings

    BT - Technical Program & Abstracts

    PB - American Vacuum Society AVS

    ER -

    Ylivaara O, Liu X, Sintonen S, Ali S, Julin J, Langner A et al. Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3. In Technical Program & Abstracts. American Vacuum Society AVS. 2014