Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3

Oili Ylivaara; Xuwen Liu; Sakari Sintonen; Saima Ali; Jaakko Julin; Andreas Langner; Eero Haimi; Timo Sajavaara; Harri Lipsanen; Simo-Pekka Hannula; Riikka L. Puurunen

Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al₂O₃

Oili Ylivaara^*, Xuwen Liu, Sakari Sintonen, Saima Ali, Jaakko Julin, Andreas Langner, Eero Haimi, Timo Sajavaara, Harri Lipsanen, Simo-Pekka Hannula, Riikka L. Puurunen

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	Technical Program & Abstracts
Publisher	American Vacuum Society (AVS)
Publication status	Published - 2014
MoE publication type	Not Eligible
Event	14th International Conference on Atomic Layer Deposition, ALD 2014 - Kyoto, Japan Duration: 15 Jun 2014 → 18 Jun 2014 Conference number: 14

Conference

Conference	14th International Conference on Atomic Layer Deposition, ALD 2014
Abbreviated title	ALD 2014
Country/Territory	Japan
City	Kyoto
Period	15/06/14 → 18/06/14

Cite this

@inbook{4e1dca778e104d1087f458f9f71c9a63,

title = "Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3",

author = "Oili Ylivaara and Xuwen Liu and Sakari Sintonen and Saima Ali and Jaakko Julin and Andreas Langner and Eero Haimi and Timo Sajavaara and Harri Lipsanen and Simo-Pekka Hannula and Puurunen, {Riikka L.}",

note = "Published abstract of a poster Project 74717 MECHALD; 14th International Conference on Atomic Layer Deposition, ALD 2014, ALD 2014 ; Conference date: 15-06-2014 Through 18-06-2014",

year = "2014",

language = "English",

booktitle = "Technical Program & Abstracts",

publisher = "American Vacuum Society (AVS)",

address = "United States",

}

Ylivaara, O, Liu, X, Sintonen, S, Ali, S, Julin, J, Langner, A, Haimi, E, Sajavaara, T, Lipsanen, H, Hannula, S-P & Puurunen, RL 2014, Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al₂O₃. in Technical Program & Abstracts. American Vacuum Society (AVS), 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan, 15/06/14.

TY - CHAP

T1 - Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3

AU - Ylivaara, Oili

AU - Liu, Xuwen

AU - Sintonen, Sakari

AU - Ali, Saima

AU - Julin, Jaakko

AU - Langner, Andreas

AU - Haimi, Eero

AU - Sajavaara, Timo

AU - Lipsanen, Harri

AU - Hannula, Simo-Pekka

AU - Puurunen, Riikka L.

N1 - Conference code: 14

PY - 2014

Y1 - 2014

M3 - Conference abstract in proceedings

BT - Technical Program & Abstracts

PB - American Vacuum Society (AVS)

T2 - 14th International Conference on Atomic Layer Deposition, ALD 2014

Y2 - 15 June 2014 through 18 June 2014

ER -