| Original language | English |
|---|---|
| Title of host publication | Technical Program & Abstracts |
| Publisher | American Vacuum Society AVS |
| Publication status | Published - 2014 |
| Event | 14th International Conference on Atomic Layer Deposition, ALD 2014 - Kyoto, Japan Duration: 15 Jun 2014 → 18 Jun 2014 Conference number: 14 |
Conference
| Conference | 14th International Conference on Atomic Layer Deposition, ALD 2014 |
|---|---|
| Abbreviated title | ALD 2014 |
| Country | Japan |
| City | Kyoto |
| Period | 15/06/14 → 18/06/14 |
Cite this
}
Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3. / Ylivaara, Oili (Corresponding author); Liu, Xuwen; Sintonen, Sakari; Ali, Saima; Julin, Jaakko; Langner, Andreas; Haimi, Eero; Sajavaara, Timo; Lipsanen, Harri; Hannula, Simo-Pekka; Puurunen, Riikka L.
Technical Program & Abstracts. American Vacuum Society AVS, 2014.Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific
TY - CHAP
T1 - Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3
AU - Ylivaara, Oili
AU - Liu, Xuwen
AU - Sintonen, Sakari
AU - Ali, Saima
AU - Julin, Jaakko
AU - Langner, Andreas
AU - Haimi, Eero
AU - Sajavaara, Timo
AU - Lipsanen, Harri
AU - Hannula, Simo-Pekka
AU - Puurunen, Riikka L.
N1 - Published abstract of a poster Project 74717 MECHALD
PY - 2014
Y1 - 2014
M3 - Conference abstract in proceedings
BT - Technical Program & Abstracts
PB - American Vacuum Society AVS
ER -