Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3

Oili Ylivaara*, Xuwen Liu, Sakari Sintonen, Saima Ali, Jaakko Julin, Andreas Langner, Eero Haimi, Timo Sajavaara, Harri Lipsanen, Simo-Pekka Hannula, Riikka L. Puurunen

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publication Technical Program & Abstracts
    PublisherAmerican Vacuum Society (AVS)
    Publication statusPublished - 2014
    MoE publication typeNot Eligible
    Event14th International Conference on Atomic Layer Deposition, ALD 2014 - Kyoto, Japan
    Duration: 15 Jun 201418 Jun 2014
    Conference number: 14

    Conference

    Conference14th International Conference on Atomic Layer Deposition, ALD 2014
    Abbreviated titleALD 2014
    Country/TerritoryJapan
    CityKyoto
    Period15/06/1418/06/14

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