Influence of the seed layer on structural and electro-acoustic properties of sputter-deposited AlN resonators
- Tommi Riekkinen*
- , Arto Nurmela
- , Jyrki Molarius
- , Tuomas Pensala
- , P. Kostamo
- , Markku Ylilammi
- , S. van Dijken
*Corresponding author for this work
- Helsinki University of Technology
Research output: Contribution to journal › Article › Scientific › peer-review
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