Influence of the seed layer on the crystalline structure and piezoelectric properties of sputter-deposited AlN-films

Keyphrases

• AlN Film 100%
• Piezoelectric Properties 100%
• Crystalline Structure 100%
• Sputter-deposited 100%
• Seed Layer 100%
• Structure Properties 100%
• AlN-Piezoelectric 100%
• Molybdenum 50%
• Nitrides 50%
• Ultra-low Power 50%
• Environmentally Friendly 50%
• Microelectronics 50%
• Stoichiometry 50%
• Micro-sized 50%
• Bottom Electrode 50%
• Film Bulk Acoustic Resonator 50%
• Piezoelectric Materials 50%
• Ubiquitous Communications 50%
• Integrated Oscillator 50%
• AlN Thin Film 50%
• High Spectral Purity 50%
• Electromechanical Coupling 50%
• Tenability 50%

INIS

• layers 100%
• films 100%
• sputtering 100%
• piezoelectricity 100%
• aluminium nitrides 100%
• thin films 50%
• purity 50%
• cost 25%
• processing 25%
• coupling 25%
• power 25%
• toxicity 25%
• electrodes 25%
• orientation 25%
• molybdenum 25%
• oscillators 25%
• resonators 25%
• stoichiometry 25%
• microelectronics 25%
• sound waves 25%

Material Science

• Aluminum Nitride 100%
• Film 100%
• Piezoelectric Property 100%
• Crystal Structure 100%
• Piezoelectricity 66%
• Thin Films 66%
• Electromechanical Coupling 33%
• Molybdenum 33%
• Resonator 33%
• Piezoelectric Material 33%
• Acoustics 33%