Infrared spectroscopy study of a poly-silicon film for optimizing the boron-implanting dose

Mikko Tuohiniemi, Martti Blomberg, Feng Gao

    Research output: Contribution to journalArticleScientificpeer-review

    2 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Infrared spectroscopy study of a poly-silicon film for optimizing the boron-implanting dose'. Together they form a unique fingerprint.

    Engineering & Materials Science