Fingerprint
Dive into the research topics of 'Infrared spectroscopy study of a poly-silicon film for optimizing the boron-implanting dose'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Infrared spectroscopy study of a poly-silicon film for optimizing the boron-implanting dose
Mikko Tuohiniemi, Martti Blomberg, Feng Gao
Research output: Contribution to journal › Article › Scientific › peer-review
2
Citations
(Scopus)