Innovative MEMS-MMIC components for agile antenna frontends

L. Baggen, W. simon, M. Arias Compo, R. Malmqvist, Tauno Vähä-Heikkilä, B. Grandchamp, P. Rolland

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)


This article describes the MEMS-MMIC building blocks, developed during the FP7 EU-project MEMS-4-MMIC, and their possible implementation in agile RF-frontend technology such as phased arrays. MEMS-4-MMIC focuses on the combination of innovative RF-MEMS switch designs with established MMIC-technology. The ultimate goal is to include RF-MEMS switches into a standard commercial MMIC foundry process; hence, such switches will become standard building blocks for MMIC circuits similar to transistors, resistors and capacitors. Within the project, not only the development and qualification of the MEMS-MMIC designs and processes are considered but also MEMS-MMIC circuits are designed for agile systems like phased arrays or cognitive radio, for example, which will benefit from this type of building blocks. A whole range of different MEMS-MMIC circuits has been realized, and measured. The impact of such building block on phased array topologies has also been evaluated.
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publication7th European Conference on Antennas and Propagation, EuCAP 2013
PublisherIEEE Institute of Electrical and Electronic Engineers
ISBN (Electronic)978-88-907018-3-2
ISBN (Print)978-1-4673-2187-7
Publication statusPublished - 2013
MoE publication typeNot Eligible
Event7th European Conference on Antennas and Propagation, EuCAP 2013 - Gothenburg, Sweden
Duration: 8 Apr 201312 Apr 2013
Conference number: 7


Conference7th European Conference on Antennas and Propagation, EuCAP 2013
Abbreviated titleEuCAP 2013


  • DPDT
  • foundry
  • GaAs
  • MEMS
  • MMIC
  • phased array
  • radar reconfigurable systems
  • SPDT
  • SPST
  • steerable antennas
  • switches

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