Integrated optical ring resonator on silicon with thermal tuning and in situ temperature measurement

Päivi Heimala, Pekka Katila, Jaakko Aarnio

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    1 Citation (Scopus)


    Small size ring resonators with ring diameter of 2 mm are fabricated using silicon nitride waveguides on silicon. The small diameter of the ring allows a large free spectral range of 26 GHz. Doped polysilicon is used as thermo-optic heating element to temperature tune and ring resonator. A poly-Si resistor is used for the first time as a thermistor to measure the waveguide temperature. The temperature coefficient of the poly-Si thermistor is measured to be 9.5 X 10-4/°C. The finesse of the ring resonator is 68 and the contrast 46%. The propagation loss of the silicon nitride rib waveguide is 0.1 dB/cm at 1312 nm. The temperature coefficient of the optical path length of the waveguide is 1.5 X 10-5/°C.
    Original languageEnglish
    Title of host publicationFunctional Photonic and Fiber Devices
    EditorsS. Iraj Najafi, Mario Nicola Armenise
    Place of PublicationBellingham
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Print)978-0-8194-2069-5
    Publication statusPublished - 1996
    MoE publication typeA4 Article in a conference publication
    EventFunctional Photonic and Fiber Devices - San Jose, United States
    Duration: 30 Jan 19961 Feb 1996

    Publication series

    SeriesProceedings of SPIE


    ConferenceFunctional Photonic and Fiber Devices
    Country/TerritoryUnited States
    CitySan Jose


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