Integrated optical ring resonator on silicon with thermal tuning and in situ temperature measurement

Päivi Heimala; Pekka Katila; Jaakko Aarnio

doi:10.1117/12.229974

Integrated optical ring resonator on silicon with thermal tuning and in situ temperature measurement

Päivi Heimala, Pekka Katila, Jaakko Aarnio

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

1 Citation (Scopus)

Abstract

Small size ring resonators with ring diameter of 2 mm are fabricated using silicon nitride waveguides on silicon. The small diameter of the ring allows a large free spectral range of 26 GHz. Doped polysilicon is used as thermo-optic heating element to temperature tune and ring resonator. A poly-Si resistor is used for the first time as a thermistor to measure the waveguide temperature. The temperature coefficient of the poly-Si thermistor is measured to be 9.5 X 10^-4/°C. The finesse of the ring resonator is 68 and the contrast 46%. The propagation loss of the silicon nitride rib waveguide is 0.1 dB/cm at 1312 nm. The temperature coefficient of the optical path length of the waveguide is 1.5 X 10^-5/°C.

Original language	English
Title of host publication	Functional Photonic and Fiber Devices
Editors	S. Iraj Najafi, Mario Nicola Armenise
Place of Publication	Bellingham
Publisher	International Society for Optics and Photonics SPIE
Pages	71-77
ISBN (Print)	0-8194-2069-7
DOIs	https://doi.org/10.1117/12.229974
Publication status	Published - 1996
MoE publication type	A4 Article in a conference publication
Event	Functional Photonic and Fiber Devices - San Jose, United States Duration: 30 Jan 1996 → 1 Feb 1996

Publication series

Series	Proceedings of SPIE
Volume	2695
ISSN	0277-786X

Conference

Conference	Functional Photonic and Fiber Devices
Country	United States
City	San Jose
Period	30/01/96 → 1/02/96

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10.1117/12.229974

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Heimala, P., Katila, P., & Aarnio, J. (1996). Integrated optical ring resonator on silicon with thermal tuning and in situ temperature measurement. In S. I. Najafi, & M. N. Armenise (Eds.), Functional Photonic and Fiber Devices (pp. 71-77). International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 2695 https://doi.org/10.1117/12.229974

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title = "Integrated optical ring resonator on silicon with thermal tuning and in situ temperature measurement",

abstract = "Small size ring resonators with ring diameter of 2 mm are fabricated using silicon nitride waveguides on silicon. The small diameter of the ring allows a large free spectral range of 26 GHz. Doped polysilicon is used as thermo-optic heating element to temperature tune and ring resonator. A poly-Si resistor is used for the first time as a thermistor to measure the waveguide temperature. The temperature coefficient of the poly-Si thermistor is measured to be 9.5 X 10-4/°C. The finesse of the ring resonator is 68 and the contrast 46%. The propagation loss of the silicon nitride rib waveguide is 0.1 dB/cm at 1312 nm. The temperature coefficient of the optical path length of the waveguide is 1.5 X 10-5/°C.",

author = "P{\"a}ivi Heimala and Pekka Katila and Jaakko Aarnio",

note = "Project code: ELE40023; Functional Photonic and Fiber Devices ; Conference date: 30-01-1996 Through 01-02-1996",

year = "1996",

doi = "10.1117/12.229974",

language = "English",

isbn = "0-8194-2069-7",

series = "Proceedings of SPIE",

publisher = "International Society for Optics and Photonics SPIE",

pages = "71--77",

editor = "Najafi, {S. Iraj} and Armenise, {Mario Nicola}",

booktitle = "Functional Photonic and Fiber Devices",

address = "United States",

}

Heimala, P, Katila, P & Aarnio, J 1996, Integrated optical ring resonator on silicon with thermal tuning and in situ temperature measurement. in SI Najafi & MN Armenise (eds), Functional Photonic and Fiber Devices. International Society for Optics and Photonics SPIE, Bellingham, Proceedings of SPIE, vol. 2695, pp. 71-77, Functional Photonic and Fiber Devices, San Jose, United States, 30/01/96. https://doi.org/10.1117/12.229974

Integrated optical ring resonator on silicon with thermal tuning and in situ temperature measurement. / Heimala, Päivi; Katila, Pekka; Aarnio, Jaakko.

Functional Photonic and Fiber Devices. ed. / S. Iraj Najafi; Mario Nicola Armenise. Bellingham : International Society for Optics and Photonics SPIE, 1996. p. 71-77 (Proceedings of SPIE, Vol. 2695).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

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T1 - Integrated optical ring resonator on silicon with thermal tuning and in situ temperature measurement

AU - Heimala, Päivi

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AU - Aarnio, Jaakko

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PY - 1996

Y1 - 1996

N2 - Small size ring resonators with ring diameter of 2 mm are fabricated using silicon nitride waveguides on silicon. The small diameter of the ring allows a large free spectral range of 26 GHz. Doped polysilicon is used as thermo-optic heating element to temperature tune and ring resonator. A poly-Si resistor is used for the first time as a thermistor to measure the waveguide temperature. The temperature coefficient of the poly-Si thermistor is measured to be 9.5 X 10-4/°C. The finesse of the ring resonator is 68 and the contrast 46%. The propagation loss of the silicon nitride rib waveguide is 0.1 dB/cm at 1312 nm. The temperature coefficient of the optical path length of the waveguide is 1.5 X 10-5/°C.

AB - Small size ring resonators with ring diameter of 2 mm are fabricated using silicon nitride waveguides on silicon. The small diameter of the ring allows a large free spectral range of 26 GHz. Doped polysilicon is used as thermo-optic heating element to temperature tune and ring resonator. A poly-Si resistor is used for the first time as a thermistor to measure the waveguide temperature. The temperature coefficient of the poly-Si thermistor is measured to be 9.5 X 10-4/°C. The finesse of the ring resonator is 68 and the contrast 46%. The propagation loss of the silicon nitride rib waveguide is 0.1 dB/cm at 1312 nm. The temperature coefficient of the optical path length of the waveguide is 1.5 X 10-5/°C.

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DO - 10.1117/12.229974

M3 - Conference article in proceedings

SN - 0-8194-2069-7

T3 - Proceedings of SPIE

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BT - Functional Photonic and Fiber Devices

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A2 - Armenise, Mario Nicola

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