@inproceedings{513a959bf00847bb88bfc68af2a2d4b2,
title = "Integrated optical ring resonator on silicon with thermal tuning and in situ temperature measurement",
abstract = "Small size ring resonators with ring diameter of 2 mm are fabricated using silicon nitride waveguides on silicon. The small diameter of the ring allows a large free spectral range of 26 GHz. Doped polysilicon is used as thermo-optic heating element to temperature tune and ring resonator. A poly-Si resistor is used for the first time as a thermistor to measure the waveguide temperature. The temperature coefficient of the poly-Si thermistor is measured to be 9.5 X 10-4/°C. The finesse of the ring resonator is 68 and the contrast 46%. The propagation loss of the silicon nitride rib waveguide is 0.1 dB/cm at 1312 nm. The temperature coefficient of the optical path length of the waveguide is 1.5 X 10-5/°C.",
author = "P{\"a}ivi Heimala and Pekka Katila and Jaakko Aarnio",
note = "Project code: ELE40023; Functional Photonic and Fiber Devices ; Conference date: 30-01-1996 Through 01-02-1996",
year = "1996",
doi = "10.1117/12.229974",
language = "English",
isbn = "0-8194-2069-7",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
pages = "71--77",
editor = "Najafi, {S. Iraj} and Armenise, {Mario Nicola}",
booktitle = "Functional Photonic and Fiber Devices",
address = "United States",
}