Integrated pressure sensors on SOI

Jyrki Kiihamäki, Hannu Kattelus, Ari Häärä, Miikka Ylimaula

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the 5th MicroStructure Workshop, MSW 2004
    Subtitle of host publication30-31 March 2004, Ystad, Sweden
    PublisherLund University
    Publication statusPublished - 2004
    MoE publication typeNot Eligible

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