Integrated pressure sensors on SOI

Jyrki Kiihamäki, Hannu Kattelus, Ari Häärä, Miikka Ylimaula

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Original languageEnglish
Title of host publicationProceedings of the 5th MicroStructure Workshop, MSW 2004
Subtitle of host publication30-31 March 2004, Ystad, Sweden
PublisherLund University
Pages105-108
Publication statusPublished - 2004
MoE publication typeNot Eligible

Cite this

Kiihamäki, J., Kattelus, H., Häärä, A., & Ylimaula, M. (2004). Integrated pressure sensors on SOI. In Proceedings of the 5th MicroStructure Workshop, MSW 2004 : 30-31 March 2004, Ystad, Sweden (pp. 105-108). Lund University.