Integrated pressure sensors on SOI

Jyrki Kiihamäki, Hannu Kattelus, Ari Häärä, Miikka Ylimaula

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Proceedings of the 5th MicroStructure Workshop, MSW 2004
Subtitle of host publication	30-31 March 2004, Ystad, Sweden
Publisher	Lund University
Pages	105-108
Publication status	Published - 2004
MoE publication type	Not Eligible

Cite this

@inproceedings{31fa06607b9f4319b877798677397114,

title = "Integrated pressure sensors on SOI",

author = "Jyrki Kiiham{\"a}ki and Hannu Kattelus and Ari H{\"a}{\"a}r{\"a} and Miikka Ylimaula",

note = "No ISBN/ISSN found for the proceedings",

year = "2004",

language = "English",

pages = "105--108",

booktitle = "Proceedings of the 5th MicroStructure Workshop, MSW 2004",

publisher = "Lund University",

address = "Sweden",

}