Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

We have fabricated a micro-supercapacitor with porous silicon electrodes coated with TiN by atomic layer deposition technique. The coating provides an efficient surface passivation and high electrical conductivity of the electrodes, resulting in stable and almost ideal electrochemical double layer capacitor behavior with characteristics comparable to the best carbon based micro-supercapacitors. Stability of the supercapacitor is verified by performing 50 000 voltammetry cycles with high capacitance retention obtained. Silicon microfabrication techniques facilitate integration of both supercapacitor electrodes inside the silicon substrate and, in this work, such in-chip supercapacitor is demonstrated. This approach allows realization of very high capacitance per foot print area. The in-chip micro-supercapacitor can be integrated with energy harvesting elements and can be used in wearable and implantable microdevices.

Original languageEnglish
Title of host publicationSmart Sensors, Actuators, and MEMS VIII
EditorsMika Prunnila, Luis Fonseca, Erwin Peiner
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Electronic)9781510609938
ISBN (Print)9781510609938
DOIs
Publication statusPublished - 1 Jan 2017
MoE publication typeA4 Article in a conference publication
EventSmart Sensors, Actuators, and MEMS VIII - Barcelona, Spain
Duration: 8 May 201711 May 2017

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume10246
ISSN (Print)0277-786X

Conference

ConferenceSmart Sensors, Actuators, and MEMS VIII
CountrySpain
CityBarcelona
Period8/05/1711/05/17

Fingerprint

Porous Silicon
Porous silicon
electrochemical capacitors
Capacitance
porous silicon
Electrode
capacitance
Silicon
Chip
Microfabrication
Passivation
Energy Harvesting
Electrical Conductivity
Capacitor
Electrodes
Coating
Carbon
Substrate
electrodes
Cycle

Keywords

  • energy, power
  • supercapacitor
  • porous silicon
  • ALD
  • TiN
  • microfabrication
  • in-chip integration
  • energy storage

Cite this

Grigoras, K., Grönberg, L., Ahopelto, J., & Prunnila, M. (2017). Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print. In M. Prunnila, L. Fonseca, & E. Peiner (Eds.), Smart Sensors, Actuators, and MEMS VIII International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 10246 https://doi.org/10.1117/12.2266603
Grigoras, Kestutis ; Grönberg, Leif ; Ahopelto, Jouni ; Prunnila, Mika. / Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print. Smart Sensors, Actuators, and MEMS VIII. editor / Mika Prunnila ; Luis Fonseca ; Erwin Peiner. International Society for Optics and Photonics SPIE, 2017. (Proceedings of SPIE, Vol. 10246).
@inproceedings{eafef99065e9489583da184a7ba62f5b,
title = "Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print",
abstract = "We have fabricated a micro-supercapacitor with porous silicon electrodes coated with TiN by atomic layer deposition technique. The coating provides an efficient surface passivation and high electrical conductivity of the electrodes, resulting in stable and almost ideal electrochemical double layer capacitor behavior with characteristics comparable to the best carbon based micro-supercapacitors. Stability of the supercapacitor is verified by performing 50 000 voltammetry cycles with high capacitance retention obtained. Silicon microfabrication techniques facilitate integration of both supercapacitor electrodes inside the silicon substrate and, in this work, such in-chip supercapacitor is demonstrated. This approach allows realization of very high capacitance per foot print area. The in-chip micro-supercapacitor can be integrated with energy harvesting elements and can be used in wearable and implantable microdevices.",
keywords = "energy, power, supercapacitor, porous silicon, ALD, TiN, microfabrication, in-chip integration, energy storage",
author = "Kestutis Grigoras and Leif Gr{\"o}nberg and Jouni Ahopelto and Mika Prunnila",
note = "Project code: 81488",
year = "2017",
month = "1",
day = "1",
doi = "10.1117/12.2266603",
language = "English",
isbn = "9781510609938",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
editor = "Mika Prunnila and Luis Fonseca and Erwin Peiner",
booktitle = "Smart Sensors, Actuators, and MEMS VIII",
address = "United States",

}

Grigoras, K, Grönberg, L, Ahopelto, J & Prunnila, M 2017, Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print. in M Prunnila, L Fonseca & E Peiner (eds), Smart Sensors, Actuators, and MEMS VIII. International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 10246, Smart Sensors, Actuators, and MEMS VIII, Barcelona, Spain, 8/05/17. https://doi.org/10.1117/12.2266603

Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print. / Grigoras, Kestutis; Grönberg, Leif; Ahopelto, Jouni; Prunnila, Mika.

Smart Sensors, Actuators, and MEMS VIII. ed. / Mika Prunnila; Luis Fonseca; Erwin Peiner. International Society for Optics and Photonics SPIE, 2017. (Proceedings of SPIE, Vol. 10246).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print

AU - Grigoras, Kestutis

AU - Grönberg, Leif

AU - Ahopelto, Jouni

AU - Prunnila, Mika

N1 - Project code: 81488

PY - 2017/1/1

Y1 - 2017/1/1

N2 - We have fabricated a micro-supercapacitor with porous silicon electrodes coated with TiN by atomic layer deposition technique. The coating provides an efficient surface passivation and high electrical conductivity of the electrodes, resulting in stable and almost ideal electrochemical double layer capacitor behavior with characteristics comparable to the best carbon based micro-supercapacitors. Stability of the supercapacitor is verified by performing 50 000 voltammetry cycles with high capacitance retention obtained. Silicon microfabrication techniques facilitate integration of both supercapacitor electrodes inside the silicon substrate and, in this work, such in-chip supercapacitor is demonstrated. This approach allows realization of very high capacitance per foot print area. The in-chip micro-supercapacitor can be integrated with energy harvesting elements and can be used in wearable and implantable microdevices.

AB - We have fabricated a micro-supercapacitor with porous silicon electrodes coated with TiN by atomic layer deposition technique. The coating provides an efficient surface passivation and high electrical conductivity of the electrodes, resulting in stable and almost ideal electrochemical double layer capacitor behavior with characteristics comparable to the best carbon based micro-supercapacitors. Stability of the supercapacitor is verified by performing 50 000 voltammetry cycles with high capacitance retention obtained. Silicon microfabrication techniques facilitate integration of both supercapacitor electrodes inside the silicon substrate and, in this work, such in-chip supercapacitor is demonstrated. This approach allows realization of very high capacitance per foot print area. The in-chip micro-supercapacitor can be integrated with energy harvesting elements and can be used in wearable and implantable microdevices.

KW - energy, power

KW - supercapacitor

KW - porous silicon

KW - ALD

KW - TiN

KW - microfabrication

KW - in-chip integration

KW - energy storage

UR - http://www.scopus.com/inward/record.url?scp=85025814116&partnerID=8YFLogxK

U2 - 10.1117/12.2266603

DO - 10.1117/12.2266603

M3 - Conference article in proceedings

SN - 9781510609938

T3 - Proceedings of SPIE

BT - Smart Sensors, Actuators, and MEMS VIII

A2 - Prunnila, Mika

A2 - Fonseca, Luis

A2 - Peiner, Erwin

PB - International Society for Optics and Photonics SPIE

ER -

Grigoras K, Grönberg L, Ahopelto J, Prunnila M. Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print. In Prunnila M, Fonseca L, Peiner E, editors, Smart Sensors, Actuators, and MEMS VIII. International Society for Optics and Photonics SPIE. 2017. (Proceedings of SPIE, Vol. 10246). https://doi.org/10.1117/12.2266603