Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    We have fabricated a micro-supercapacitor with porous silicon electrodes coated with TiN by atomic layer deposition technique. The coating provides an efficient surface passivation and high electrical conductivity of the electrodes, resulting in stable and almost ideal electrochemical double layer capacitor behavior with characteristics comparable to the best carbon based micro-supercapacitors. Stability of the supercapacitor is verified by performing 50 000 voltammetry cycles with high capacitance retention obtained. Silicon microfabrication techniques facilitate integration of both supercapacitor electrodes inside the silicon substrate and, in this work, such in-chip supercapacitor is demonstrated. This approach allows realization of very high capacitance per foot print area. The in-chip micro-supercapacitor can be integrated with energy harvesting elements and can be used in wearable and implantable microdevices.

    Original languageEnglish
    Title of host publicationSmart Sensors, Actuators, and MEMS VIII
    EditorsMika Prunnila, Luis Fonseca, Erwin Peiner
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Electronic)9781510609938
    ISBN (Print)9781510609938
    DOIs
    Publication statusPublished - 1 Jan 2017
    MoE publication typeA4 Article in a conference publication
    EventSmart Sensors, Actuators, and MEMS VIII - Barcelona, Spain
    Duration: 8 May 201711 May 2017

    Publication series

    SeriesProceedings of SPIE
    Volume10246
    ISSN0277-786X

    Conference

    ConferenceSmart Sensors, Actuators, and MEMS VIII
    CountrySpain
    CityBarcelona
    Period8/05/1711/05/17

    Fingerprint

    Porous Silicon
    Porous silicon
    electrochemical capacitors
    Capacitance
    porous silicon
    Electrode
    capacitance
    Silicon
    Chip
    Microfabrication
    Passivation
    Energy Harvesting
    Electrical Conductivity
    Capacitor
    Electrodes
    Coating
    Carbon
    Substrate
    electrodes
    Cycle

    Keywords

    • energy, power
    • supercapacitor
    • porous silicon
    • ALD
    • TiN
    • microfabrication
    • in-chip integration
    • energy storage

    Cite this

    Grigoras, K., Grönberg, L., Ahopelto, J., & Prunnila, M. (2017). Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print. In M. Prunnila, L. Fonseca, & E. Peiner (Eds.), Smart Sensors, Actuators, and MEMS VIII International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 10246 https://doi.org/10.1117/12.2266603
    Grigoras, Kestutis ; Grönberg, Leif ; Ahopelto, Jouni ; Prunnila, Mika. / Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print. Smart Sensors, Actuators, and MEMS VIII. editor / Mika Prunnila ; Luis Fonseca ; Erwin Peiner. International Society for Optics and Photonics SPIE, 2017. (Proceedings of SPIE, Vol. 10246).
    @inproceedings{eafef99065e9489583da184a7ba62f5b,
    title = "Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print",
    abstract = "We have fabricated a micro-supercapacitor with porous silicon electrodes coated with TiN by atomic layer deposition technique. The coating provides an efficient surface passivation and high electrical conductivity of the electrodes, resulting in stable and almost ideal electrochemical double layer capacitor behavior with characteristics comparable to the best carbon based micro-supercapacitors. Stability of the supercapacitor is verified by performing 50 000 voltammetry cycles with high capacitance retention obtained. Silicon microfabrication techniques facilitate integration of both supercapacitor electrodes inside the silicon substrate and, in this work, such in-chip supercapacitor is demonstrated. This approach allows realization of very high capacitance per foot print area. The in-chip micro-supercapacitor can be integrated with energy harvesting elements and can be used in wearable and implantable microdevices.",
    keywords = "energy, power, supercapacitor, porous silicon, ALD, TiN, microfabrication, in-chip integration, energy storage",
    author = "Kestutis Grigoras and Leif Gr{\"o}nberg and Jouni Ahopelto and Mika Prunnila",
    note = "Project code: 81488",
    year = "2017",
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    Grigoras, K, Grönberg, L, Ahopelto, J & Prunnila, M 2017, Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print. in M Prunnila, L Fonseca & E Peiner (eds), Smart Sensors, Actuators, and MEMS VIII. International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 10246, Smart Sensors, Actuators, and MEMS VIII, Barcelona, Spain, 8/05/17. https://doi.org/10.1117/12.2266603

    Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print. / Grigoras, Kestutis; Grönberg, Leif; Ahopelto, Jouni; Prunnila, Mika.

    Smart Sensors, Actuators, and MEMS VIII. ed. / Mika Prunnila; Luis Fonseca; Erwin Peiner. International Society for Optics and Photonics SPIE, 2017. (Proceedings of SPIE, Vol. 10246).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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    N2 - We have fabricated a micro-supercapacitor with porous silicon electrodes coated with TiN by atomic layer deposition technique. The coating provides an efficient surface passivation and high electrical conductivity of the electrodes, resulting in stable and almost ideal electrochemical double layer capacitor behavior with characteristics comparable to the best carbon based micro-supercapacitors. Stability of the supercapacitor is verified by performing 50 000 voltammetry cycles with high capacitance retention obtained. Silicon microfabrication techniques facilitate integration of both supercapacitor electrodes inside the silicon substrate and, in this work, such in-chip supercapacitor is demonstrated. This approach allows realization of very high capacitance per foot print area. The in-chip micro-supercapacitor can be integrated with energy harvesting elements and can be used in wearable and implantable microdevices.

    AB - We have fabricated a micro-supercapacitor with porous silicon electrodes coated with TiN by atomic layer deposition technique. The coating provides an efficient surface passivation and high electrical conductivity of the electrodes, resulting in stable and almost ideal electrochemical double layer capacitor behavior with characteristics comparable to the best carbon based micro-supercapacitors. Stability of the supercapacitor is verified by performing 50 000 voltammetry cycles with high capacitance retention obtained. Silicon microfabrication techniques facilitate integration of both supercapacitor electrodes inside the silicon substrate and, in this work, such in-chip supercapacitor is demonstrated. This approach allows realization of very high capacitance per foot print area. The in-chip micro-supercapacitor can be integrated with energy harvesting elements and can be used in wearable and implantable microdevices.

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    Grigoras K, Grönberg L, Ahopelto J, Prunnila M. Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print. In Prunnila M, Fonseca L, Peiner E, editors, Smart Sensors, Actuators, and MEMS VIII. International Society for Optics and Photonics SPIE. 2017. (Proceedings of SPIE, Vol. 10246). https://doi.org/10.1117/12.2266603