Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review


    We have fabricated a micro-supercapacitor with porous silicon electrodes coated with TiN by atomic layer deposition technique. The coating provides an efficient surface passivation and high electrical conductivity of the electrodes, resulting in stable and almost ideal electrochemical double layer capacitor behavior with characteristics comparable to the best carbon based micro-supercapacitors. Stability of the supercapacitor is verified by performing 50 000 voltammetry cycles with high capacitance retention obtained. Silicon microfabrication techniques facilitate integration of both supercapacitor electrodes inside the silicon substrate and, in this work, such in-chip supercapacitor is demonstrated. This approach allows realization of very high capacitance per foot print area. The in-chip micro-supercapacitor can be integrated with energy harvesting elements and can be used in wearable and implantable microdevices.
    Original languageEnglish
    Title of host publicationSmart Sensors, Actuators, and MEMS VIII
    EditorsMika Prunnila, Luis Fonseca, Erwin Peiner
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Print)978-1-5106-0993-8
    Publication statusPublished - 1 Jan 2017
    MoE publication typeA4 Article in a conference publication
    EventSmart Sensors, Actuators, and MEMS VIII - Barcelona, Spain
    Duration: 8 May 201711 May 2017

    Publication series

    SeriesProceedings of SPIE


    ConferenceSmart Sensors, Actuators, and MEMS VIII


    • energy, power
    • supercapacitor
    • porous silicon
    • ALD
    • TiN
    • microfabrication
    • in-chip integration
    • energy storage
    • OtaNano


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