Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print

Engineering

• Atomic Layer Deposition 16%
• Capacitance 50%
• Characteristics 16%
• Coating 16%
• Cycles 16%
• Electrochemical Capacitor 16%
• Electrochemical Double Layer Capacitor 16%
• Elements 16%
• Energy Harvesting 16%
• High Electrical Conductivity 16%
• Integration 16%
• Microfabrication Technique 16%
• Porous Silicon 33%
• Print Area 16%
• Realization 16%
• Silicon 50%
• Silicon Electrode 16%
• Silicon Substrate 16%
• Stability 16%
• Supercapacitor 100%

Material Science

• Coating 16%
• Electrode 33%
• Microdevices 16%
• Porous Silicon 33%
• Surface Passivation 50%

Chemistry

• Atom 16%
• Atomic Layer Epitaxy 16%
• Carbon 16%
• Coating Agent 16%
• Deposition Technique 16%
• Voltammetry 33%