Integration of 2D and 3D nanostructure fabrication with wafer-scale microelectronics: Photonic crystals and graphene: Dissertation

INIS

• graphene 100%
• nanostructures 100%
• fabrication 100%
• crystals 100%
• microelectronics 100%
• applications 33%
• thin films 33%
• substrates 25%
• production 16%
• silicon 16%
• processing 16%
• opals 16%
• interactions 8%
• environment 8%
• thickness 8%
• proteins 8%
• design 8%
• devices 8%
• chemical vapor deposition 8%
• length 8%
• growth 8%
• sensors 8%
• atoms 8%
• precision 8%
• sheets 8%
• contamination 8%
• purity 8%
• budgets 8%
• waveguides 8%
• field effect transistors 8%
• receptors 8%
• etching 8%

Material Science

• Photonic Crystal 100%
• Nanocrystalline Material 100%
• Graphene 100%
• Thin Films 25%
• Self Assembly 25%
• Photonic Band Gap 16%
• Silicon 16%
• Waveguide 8%
• Electronic Property 8%
• Lithography 8%
• Chemical Vapor Deposition 8%
• Field Effect Transistors 8%
• Thin Film Growth 8%

Keyphrases

• Microelectronic Processes 50%
• Thin Film Transfer 25%
• Silicon Photonic Crystal 25%