Integration of rotated 3-D structures into pre-patterned PMMA substrate using step & stamp nanoimprint lithography

Tomi Haatainen (Corresponding Author), Tapio Mäkelä, Arne Schleunitz, Gianluca Grenci, Massimo Tormen

Research output: Contribution to journalArticle

4 Citations (Scopus)


In this work, we fabricated hybrid micron-scale blazed grating structures on top of linear nanoscale gratings by superimposing thermal nanoimprint process. A poly(methyl methacrylate) (PMMA) substrate was at first pre-patterned with a nanoscale binary line grating by thermal NIL. The second imprint was added into the linear surface-gratings by sequential thermal imprinting using a stamp with micron-scale blazed gratings. The rotation controlled patterning was realized by Step and Stamp Imprint Lithography (SSIL) using NPS300 nanoimprinting stepper with a rotation imprint head with ability to control X/Y positioning and angular orientation of the stamp. In this paper, we demonstrate the potential of the hybrid imprint process for fabrication of e.g. hybrid bio devices or optical elements with arbitrary orientation.
Original languageEnglish
Pages (from-to)180-183
Number of pages3
JournalMicroelectronic Engineering
Publication statusPublished - 2012
MoE publication typeA1 Journal article-refereed
Event37th International Conference on Micro- and Nano-Engineering, MNE 2011 - Berlin, Germany
Duration: 19 Sep 201123 Sep 2011
Conference number: 37



  • LIGA
  • nanoimprint
  • NIL
  • SSIL
  • step and repeat
  • three-dimensional nanofabrication

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