Integration of self-assembled three-dimensional photonic crystals onto structured silicon wafers

J. Ye, R. Zentel (Corresponding Author), Sanna Arpiainen, Jouni Ahopelto, F. Jonsson, S.G. Romanov, C.M. Sotomayor Torres

Research output: Contribution to journalArticleScientificpeer-review

32 Citations (Scopus)

Abstract

We report on the fabrication of high-quality opaline photonic crystals from large silica spheres (diameter of 890 nm), self-assembled in hydrophilic trenches of silicon wafers by using a novel technique coined a combination of “lifting and stirring”. The achievements reported here comprise a spatial selectivity of opal crystallization without special treatment of the wafer surface, a filling of the trenches up to the top, leading to a spatially uniform film thickness, particularly an absence of cracks within the size of the trenches, and finally a good 3D order of the opal lattice even in trenches with a complex confined geometry, verified using optical measurements. The opal lattice was found to match the pattern precisely in width as well as depth, providing an important step toward applications of opals in integrated optics.
Original languageEnglish
Pages (from-to)7378-7383
Number of pages6
JournalLangmuir
Volume22
Issue number17
DOIs
Publication statusPublished - 2006
MoE publication typeA1 Journal article-refereed

Fingerprint

Integrated optics
Crystallization
Photonic crystals
Silicon wafers
Silicon Dioxide
Film thickness
Silica
wafers
photonics
Cracks
Fabrication
Geometry
integrated optics
silicon
stirring
optical measurement
crystals
film thickness
cracks
selectivity

Keywords

  • photonic crystals
  • optoelectronic devices
  • silicon wafer
  • opals

Cite this

Ye, J. ; Zentel, R. ; Arpiainen, Sanna ; Ahopelto, Jouni ; Jonsson, F. ; Romanov, S.G. ; Sotomayor Torres, C.M. / Integration of self-assembled three-dimensional photonic crystals onto structured silicon wafers. In: Langmuir. 2006 ; Vol. 22, No. 17. pp. 7378-7383.
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Integration of self-assembled three-dimensional photonic crystals onto structured silicon wafers. / Ye, J.; Zentel, R. (Corresponding Author); Arpiainen, Sanna; Ahopelto, Jouni; Jonsson, F.; Romanov, S.G.; Sotomayor Torres, C.M.

In: Langmuir, Vol. 22, No. 17, 2006, p. 7378-7383.

Research output: Contribution to journalArticleScientificpeer-review

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AU - Romanov, S.G.

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