Integration of SIMS into a general purpose IBA data analysis code

N. P. Barradas, Jari Likonen, E. Alves, L. C. Alves, P. Coad, Antti Hakola, A. Widdowson

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)

Abstract

IBA techniques such as RBS, ERDA, NRA, or PIXE are highly complementary, and are often combined to maximize the extracted information. In particular, they have different sensitivities to various elements and probe different depth scales. The same is true for secondary ion mass spectrometry (SIMS), that can have much better detection limits for many species. Quantification of SIMS data normally requires careful calibration of the exact system being studied, and often the results are only semi-quantitative. Nevertheless, when SIMS is used together with other IBA techniques, it would be highly desirable to integrate the data analysis. We developed a routine to analyse SIMS data, and implemented it in NDF, a standard IBA data analysis code, that already supported RBS, ERDA, resonant and non-resonant NRA, and PIXE. Details of this new routine are presented in this work. (9 refs.)
Original languageEnglish
Pages (from-to)281-285
JournalAIP Conference Proceedings
Volume1336
Issue number1
DOIs
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed
Event21st International Conference on Application of Accelerators in Research and Industry - Forth Worth, United States
Duration: 8 Aug 201013 Aug 2010

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secondary ion mass spectrometry
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sensitivity

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Barradas, N. P. ; Likonen, Jari ; Alves, E. ; Alves, L. C. ; Coad, P. ; Hakola, Antti ; Widdowson, A. / Integration of SIMS into a general purpose IBA data analysis code. In: AIP Conference Proceedings. 2011 ; Vol. 1336, No. 1. pp. 281-285.
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abstract = "IBA techniques such as RBS, ERDA, NRA, or PIXE are highly complementary, and are often combined to maximize the extracted information. In particular, they have different sensitivities to various elements and probe different depth scales. The same is true for secondary ion mass spectrometry (SIMS), that can have much better detection limits for many species. Quantification of SIMS data normally requires careful calibration of the exact system being studied, and often the results are only semi-quantitative. Nevertheless, when SIMS is used together with other IBA techniques, it would be highly desirable to integrate the data analysis. We developed a routine to analyse SIMS data, and implemented it in NDF, a standard IBA data analysis code, that already supported RBS, ERDA, resonant and non-resonant NRA, and PIXE. Details of this new routine are presented in this work. (9 refs.)",
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Barradas, NP, Likonen, J, Alves, E, Alves, LC, Coad, P, Hakola, A & Widdowson, A 2011, 'Integration of SIMS into a general purpose IBA data analysis code', AIP Conference Proceedings, vol. 1336, no. 1, pp. 281-285. https://doi.org/10.1063/1.3586104

Integration of SIMS into a general purpose IBA data analysis code. / Barradas, N. P.; Likonen, Jari; Alves, E.; Alves, L. C.; Coad, P.; Hakola, Antti; Widdowson, A.

In: AIP Conference Proceedings, Vol. 1336, No. 1, 2011, p. 281-285.

Research output: Contribution to journalArticleScientificpeer-review

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