Integration of SIMS into a general purpose IBA data analysis code

N. P. Barradas, Jari Likonen, E. Alves, L. C. Alves, P. Coad, Antti Hakola, A. Widdowson

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    3 Citations (Scopus)

    Abstract

    IBA techniques such as RBS, ERDA, NRA, or PIXE are highly complementary, and are often combined to maximize the extracted information. In particular, they have different sensitivities to various elements and probe different depth scales. The same is true for secondary ion mass spectrometry (SIMS), that can have much better detection limits for many species. Quantification of SIMS data normally requires careful calibration of the exact system being studied, and often the results are only semi-quantitative. Nevertheless, when SIMS is used together with other IBA techniques, it would be highly desirable to integrate the data analysis. We developed a routine to analyse SIMS data, and implemented it in NDF, a standard IBA data analysis code, that already supported RBS, ERDA, resonant and non-resonant NRA, and PIXE. Details of this new routine are presented in this work. (9 refs.)
    Original languageEnglish
    Title of host publicationApplication of Accelertors in Research and Industry: Twenty‐First International Conference
    PublisherAmerican Institute of Physics AIP
    Pages281-285
    ISBN (Print)978-0-7354-0891-3
    DOIs
    Publication statusPublished - 2011
    MoE publication typeA4 Article in a conference publication
    Event21st International Conference on Application of Accelerators in Research and Industry - Forth Worth, United States
    Duration: 8 Aug 201013 Aug 2010

    Publication series

    SeriesAIP Conference Proceedings
    Number1
    Volume1336
    ISSN0094-243X

    Conference

    Conference21st International Conference on Application of Accelerators in Research and Industry
    CountryUnited States
    CityForth Worth
    Period8/08/1013/08/10

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