Integration of SOI-based 2D- and Si-based 3D photonic crystals

G. Kocher; W. Khunsin; J. R. Vivas; K. Vynck; Sanna Arpiainen; S. G. Romanov; B. Lange; M. Mulot; F. Johnsson; T. Charvolin; E. Hajdi; D. Cassagne; R. Zentel; Jouni Ahopelto; C. M. S. Torres

doi:10.1149/1.2728851

Integration of SOI-based 2D- and Si-based 3D photonic crystals

G. Kocher, W. Khunsin, J. R. Vivas, K. Vynck, Sanna Arpiainen, S. G. Romanov, B. Lange, M. Mulot, F. Johnsson, T. Charvolin, E. Hajdi, D. Cassagne, R. Zentel, Jouni Ahopelto, C. M. S. Torres

Research output: Contribution to journal › Article in a proceedings journal › Scientific › peer-review

Abstract

We present progress towards a generic approach to integrate 2D photonic components embedded in 3D PhCs and couple them to single-mode ridge waveguides. 3D photonic crystals are fabricated by spatially selective self-assembly of silica and PMMA beads into an fee lattice on a SOI patterned substrate. 2D defect layers are fabricated on 3D PMMA opals by controlled removal of specific beads through electron beam lithography. Simulations of mode matching and coupling efficiencies are presented, which provide guidelines for the fabrication of experimental structures on inverted silicon opals.

Original language	English
Pages (from-to)	133-138
Journal	ECS Transactions
Volume	6
Issue number	14
DOIs	https://doi.org/10.1149/1.2728851
Publication status	Published - 2007
MoE publication type	A4 Article in a conference publication

Access to Document

10.1149/1.2728851

Cite this

@article{1cee7205f5424d23b057171d87dfe78b,

title = "Integration of SOI-based 2D- and Si-based 3D photonic crystals",

abstract = "We present progress towards a generic approach to integrate 2D photonic components embedded in 3D PhCs and couple them to single-mode ridge waveguides. 3D photonic crystals are fabricated by spatially selective self-assembly of silica and PMMA beads into an fee lattice on a SOI patterned substrate. 2D defect layers are fabricated on 3D PMMA opals by controlled removal of specific beads through electron beam lithography. Simulations of mode matching and coupling efficiencies are presented, which provide guidelines for the fabrication of experimental structures on inverted silicon opals.",

author = "G. Kocher and W. Khunsin and Vivas, {J. R.} and K. Vynck and Sanna Arpiainen and Romanov, {S. G.} and B. Lange and M. Mulot and F. Johnsson and T. Charvolin and E. Hajdi and D. Cassagne and R. Zentel and Jouni Ahopelto and Torres, {C. M. S.}",

year = "2007",

doi = "10.1149/1.2728851",

language = "English",

volume = "6",

pages = "133--138",

journal = "ECS Transactions",

issn = "1938-5862",

publisher = "Electrochemical Society ECS",

number = "14",

}

TY - JOUR

T1 - Integration of SOI-based 2D- and Si-based 3D photonic crystals

AU - Kocher, G.

AU - Khunsin, W.

AU - Vivas, J. R.

AU - Vynck, K.

AU - Arpiainen, Sanna

AU - Romanov, S. G.

AU - Lange, B.

AU - Mulot, M.

AU - Johnsson, F.

AU - Charvolin, T.

AU - Hajdi, E.

AU - Cassagne, D.

AU - Zentel, R.

AU - Ahopelto, Jouni

AU - Torres, C. M. S.

PY - 2007

Y1 - 2007

N2 - We present progress towards a generic approach to integrate 2D photonic components embedded in 3D PhCs and couple them to single-mode ridge waveguides. 3D photonic crystals are fabricated by spatially selective self-assembly of silica and PMMA beads into an fee lattice on a SOI patterned substrate. 2D defect layers are fabricated on 3D PMMA opals by controlled removal of specific beads through electron beam lithography. Simulations of mode matching and coupling efficiencies are presented, which provide guidelines for the fabrication of experimental structures on inverted silicon opals.

AB - We present progress towards a generic approach to integrate 2D photonic components embedded in 3D PhCs and couple them to single-mode ridge waveguides. 3D photonic crystals are fabricated by spatially selective self-assembly of silica and PMMA beads into an fee lattice on a SOI patterned substrate. 2D defect layers are fabricated on 3D PMMA opals by controlled removal of specific beads through electron beam lithography. Simulations of mode matching and coupling efficiencies are presented, which provide guidelines for the fabrication of experimental structures on inverted silicon opals.

U2 - 10.1149/1.2728851

DO - 10.1149/1.2728851

M3 - Article in a proceedings journal

SN - 1938-5862

VL - 6

SP - 133

EP - 138

JO - ECS Transactions

JF - ECS Transactions

IS - 14

ER -

Integration of SOI-based 2D- and Si-based 3D photonic crystals

Abstract

Access to Document

Fingerprint

Cite this