Integration of SOI-based 2D- and Si-based 3D photonic crystals

G. Kocher, W. Khunsin, J. R. Vivas, K. Vynck, Sanna Arpiainen, S. G. Romanov, B. Lange, M. Mulot, F. Johnsson, T. Charvolin, E. Hajdi, D. Cassagne, R. Zentel, Jouni Ahopelto, C. M. S. Torres

    Research output: Contribution to journalArticle in a proceedings journalScientificpeer-review

    Abstract

    We present progress towards a generic approach to integrate 2D photonic components embedded in 3D PhCs and couple them to single-mode ridge waveguides. 3D photonic crystals are fabricated by spatially selective self-assembly of silica and PMMA beads into an fee lattice on a SOI patterned substrate. 2D defect layers are fabricated on 3D PMMA opals by controlled removal of specific beads through electron beam lithography. Simulations of mode matching and coupling efficiencies are presented, which provide guidelines for the fabrication of experimental structures on inverted silicon opals.
    Original languageEnglish
    Pages (from-to)133-138
    JournalECS Transactions
    Volume6
    Issue number14
    DOIs
    Publication statusPublished - 2007
    MoE publication typeA4 Article in a conference publication

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  • Cite this

    Kocher, G., Khunsin, W., Vivas, J. R., Vynck, K., Arpiainen, S., Romanov, S. G., Lange, B., Mulot, M., Johnsson, F., Charvolin, T., Hajdi, E., Cassagne, D., Zentel, R., Ahopelto, J., & Torres, C. M. S. (2007). Integration of SOI-based 2D- and Si-based 3D photonic crystals. ECS Transactions, 6(14), 133-138. https://doi.org/10.1149/1.2728851