Interactive personal-computer data analysis of ion backscattering spectra

Jaakko Saarilahti, E. Rauhala

    Research output: Contribution to journalArticleScientificpeer-review

    298 Citations (Scopus)


    A new personal computer program package for ion backscattering data analysis with an interactive graphical interface has been developed. The assumed target composition is modified directly by pointing at the corresponding signals on the screen. Special attention has been paid to the physics details included. All projectile ions may be treated. A data base of non-Rutherford 1H and 4He scattering cross sections of several light elements, readily extendable by the user, is included. The most recent stopping power formulations are used. Contributions from electronic screening, corrected Bohr straggling and nonlinear detector response are taken into account. A procedure for subtracting the low energy tail background is provided. Smooth variations of elemental composition as a function of sample depth, as needed in diffusion or implantation profile analysis, as well as spectra taken in channeled sample orientations may be assumed. A short review of published computer methods for ion backscattering is included. Examples and applications of the present procedure to the analysis of 4He ion non-Rutherford and 12C ion RBS spectra are presented.

    Original languageEnglish
    Pages (from-to)734-738
    JournalNuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Issue number1-4
    Publication statusPublished - 2 Feb 1992
    MoE publication typeA1 Journal article-refereed


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