Intercomparison of flatness measurements of an optical flat at apertures of up to 150 mm in diameter

Susanne Quabis; Michael Schulz; Gerhard Ehret; Muharrem Asar; Peter Balling; Petr Kren; R.H. Bergmans; A. Küng; Antti Lassila; D. Putland; D. Williams; H. Pirée; E. Prieto; M. Pérez; L. Svedova; Z. Ramotowski; M. Vannoni; F. Hungwe; Y. Kang

doi:10.1088/1681-7575/aa535c

Intercomparison of flatness measurements of an optical flat at apertures of up to 150 mm in diameter

Susanne Quabis, Michael Schulz, Gerhard Ehret, Muharrem Asar, Peter Balling, Petr Kren, R.H. Bergmans, A. Küng, Antti Lassila, D. Putland, D. Williams, H. Pirée, E. Prieto, M. Pérez, L. Svedova, Z. Ramotowski, M. Vannoni, F. Hungwe, Y. Kang

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Abstract

Recently, a scientific comparison of flatness measuring instruments at European National Metrology Institutes (NMIs) was performed in the framework of EURAMET. The specimen was a well-polished optical surface with a maximum measurement aperture of 150 mm in diameter. Here, we present an evaluation concept, which allows the determination of a mean flatness map taking into account different lateral resolutions of the instruments and different orientations of the specimen during measurement. We found that all measurements are in agreement with the mean flatness map within the uncertainty intervals stated by the participants. The aim of this scientific comparison is to specify an appropriate operation and evaluation procedure for future comparisons.

Original language	English
Pages (from-to)	85-93
Journal	Metrologia
Volume	54
Issue number	1
DOIs	https://doi.org/10.1088/1681-7575/aa535c
Publication status	Published - 1 Feb 2017
MoE publication type	A1 Journal article-refereed

Keywords

uncertainty analysis
comparison
deflectometry
EURAMET
flatness measurements
lateral resolution
measuring instruments
national metrology institutes
uncertainty intervals
interferometry

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Quabis, S., Schulz, M., Ehret, G., Asar, M., Balling, P., Kren, P., Bergmans, R. H., Küng, A., Lassila, A., Putland, D., Williams, D., Pirée, H., Prieto, E., Pérez, M., Svedova, L., Ramotowski, Z., Vannoni, M., Hungwe, F., & Kang, Y. (2017). Intercomparison of flatness measurements of an optical flat at apertures of up to 150 mm in diameter. Metrologia, 54(1), 85-93. https://doi.org/10.1088/1681-7575/aa535c

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abstract = "Recently, a scientific comparison of flatness measuring instruments at European National Metrology Institutes (NMIs) was performed in the framework of EURAMET. The specimen was a well-polished optical surface with a maximum measurement aperture of 150 mm in diameter. Here, we present an evaluation concept, which allows the determination of a mean flatness map taking into account different lateral resolutions of the instruments and different orientations of the specimen during measurement. We found that all measurements are in agreement with the mean flatness map within the uncertainty intervals stated by the participants. The aim of this scientific comparison is to specify an appropriate operation and evaluation procedure for future comparisons.",

keywords = "uncertainty analysis, comparison, deflectometry, EURAMET, flatness measurements, lateral resolution, measuring instruments, national metrology institutes, uncertainty intervals, interferometry",

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Quabis, S, Schulz, M, Ehret, G, Asar, M, Balling, P, Kren, P, Bergmans, RH, Küng, A, Lassila, A, Putland, D, Williams, D, Pirée, H, Prieto, E, Pérez, M, Svedova, L, Ramotowski, Z, Vannoni, M, Hungwe, F & Kang, Y 2017, 'Intercomparison of flatness measurements of an optical flat at apertures of up to 150 mm in diameter', Metrologia, vol. 54, no. 1, pp. 85-93. https://doi.org/10.1088/1681-7575/aa535c

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T1 - Intercomparison of flatness measurements of an optical flat at apertures of up to 150 mm in diameter

AU - Quabis, Susanne

AU - Schulz, Michael

AU - Ehret, Gerhard

AU - Asar, Muharrem

AU - Balling, Peter

AU - Kren, Petr

AU - Bergmans, R.H.

AU - Küng, A.

AU - Lassila, Antti

AU - Putland, D.

AU - Williams, D.

AU - Pirée, H.

AU - Prieto, E.

AU - Pérez, M.

AU - Svedova, L.

AU - Ramotowski, Z.

AU - Vannoni, M.

AU - Hungwe, F.

AU - Kang, Y.

PY - 2017/2/1

Y1 - 2017/2/1

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KW - uncertainty analysis

KW - comparison

KW - deflectometry

KW - EURAMET

KW - flatness measurements

KW - lateral resolution

KW - measuring instruments

KW - national metrology institutes

KW - uncertainty intervals

KW - interferometry

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SP - 85

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JO - Metrologia

JF - Metrologia

IS - 1

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Intercomparison of flatness measurements of an optical flat at apertures of up to 150 mm in diameter

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Keywords

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