Keyphrases
Atomic Force Microscope
100%
Scanning Electron Microscope
100%
Northern Europe
100%
Grating
100%
Calibration Method
33%
Uncertainty Estimation
33%
National Metrology Institute
33%
Grating pitch
33%
Research Laboratories
33%
Measurement Capability
33%
Uncertainty Budget
33%
Uncalibrated
33%
Scale Calibration
33%
Owen Value
33%
Pitch Measurement
33%
INIS
atomic force microscopy
100%
scanning electron microscopy
100%
europe
100%
laboratories
100%
gratings
80%
values
60%
calibration
60%
comparative evaluations
20%
correlations
20%
pitches
20%
accuracy
20%
metrology
20%
budgets
20%
Engineering
Atomic Force Microscope
100%
Scanning Electron Microscope
100%
Reference Value
66%
Calibration Procedure
33%
Scale Factor
33%
Research Laboratories
33%
Earth and Planetary Sciences
Northern Europe
100%
Laboratory Research
50%
Chemistry
Scanning Electron Microscopy
100%
Metrology
50%