Intercomparison of lateral scales of SEM and AFM microscopes in research institutes in Northern Europe

S. Jeremias Seppä, Virpi Korpelainen, Sten Bergstrand, Helge Karlsson, Lauri Lillepea, Antti Lassila

Research output: Book/ReportReport

Abstract

An intercomparison (Nordic-nano1) of lateral scales of SEM and AFM microscopes in research institutes in Northern Europe. Grating samples (1D) were circulated among the participating laboratories. The laboratories were also asked about the calibration of their instruments. The results for both nominally 300 nm and 700 nm gratings show that a simple scale factor calibration would have corrected a large part of the deviations from the reference values. The accuracy of the uncertainty estimates varied between the laboratories, and for some laboratories the appropriateness of the calibration procedures could be considered.
Original languageEnglish
Place of PublicationEspoo
PublisherCentre of Metrology and Accreditation
ISBN (Print)978-952-5610-97-0 (PDF)
Publication statusPublished - 2012
MoE publication typeD4 Published development or research report or study

Publication series

SeriesMIKES Publication
NumberJ1/2012
ISSN1235-5704

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Keywords

  • interlaboratory comparison
  • calibration
  • latereal scales

Cite this

Seppä, S. J., Korpelainen, V., Bergstrand, S., Karlsson, H., Lillepea, L., & Lassila, A. (2012). Intercomparison of lateral scales of SEM and AFM microscopes in research institutes in Northern Europe. Centre of Metrology and Accreditation. MIKES Publication, No. J1/2012