Intercomparison of lateral scales of SEM and AFM microscopes in research institutes in Northern Europe

S. Jeremias Seppä, Virpi Korpelainen, Sten Bergstrand, Helge Karlsson, Lauri Lillepea, Antti Lassila

    Research output: Book/ReportReport

    Abstract

    An intercomparison (Nordic-nano1) of lateral scales of SEM and AFM microscopes in research institutes in Northern Europe. Grating samples (1D) were circulated among the participating laboratories. The laboratories were also asked about the calibration of their instruments. The results for both nominally 300 nm and 700 nm gratings show that a simple scale factor calibration would have corrected a large part of the deviations from the reference values. The accuracy of the uncertainty estimates varied between the laboratories, and for some laboratories the appropriateness of the calibration procedures could be considered.
    Original languageEnglish
    Place of PublicationEspoo
    PublisherCentre of Metrology and Accreditation (MIKES)
    ISBN (Print)978-952-5610-97-0 (PDF)
    Publication statusPublished - 2012
    MoE publication typeD4 Published development or research report or study

    Publication series

    SeriesMIKES Publication
    NumberJ1/2012
    ISSN1235-5704

    Keywords

    • interlaboratory comparison
    • calibration
    • latereal scales

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