Intercomparison of lateral scales of SEM and AFM microscopes in research institutes in Northern Europe

S. Jeremias Seppä, Virpi Korpelainen, Sten Bergstrand, Helge Karlsson, Lauri Lillepea, Antti Lassila

Research output: Book/ReportReport

Abstract

An intercomparison (Nordic-nano1) of lateral scales of SEM and AFM microscopes in research institutes in Northern Europe. Grating samples (1D) were circulated among the participating laboratories. The laboratories were also asked about the calibration of their instruments. The results for both nominally 300 nm and 700 nm gratings show that a simple scale factor calibration would have corrected a large part of the deviations from the reference values. The accuracy of the uncertainty estimates varied between the laboratories, and for some laboratories the appropriateness of the calibration procedures could be considered.
Original languageEnglish
Place of PublicationEspoo
PublisherCentre of Metrology and Accreditation
ISBN (Print)978-952-5610-97-0 (PDF)
Publication statusPublished - 2012
MoE publication typeD4 Published development or research report or study

Publication series

SeriesMIKES Publication
NumberJ1/2012
ISSN1235-5704

Fingerprint

scanning electron microscopy
calibration
Europe
laboratory

Keywords

  • interlaboratory comparison
  • calibration
  • latereal scales

Cite this

Seppä, S. J., Korpelainen, V., Bergstrand, S., Karlsson, H., Lillepea, L., & Lassila, A. (2012). Intercomparison of lateral scales of SEM and AFM microscopes in research institutes in Northern Europe. Espoo: Centre of Metrology and Accreditation. MIKES Publication, No. J1/2012
Seppä, S. Jeremias ; Korpelainen, Virpi ; Bergstrand, Sten ; Karlsson, Helge ; Lillepea, Lauri ; Lassila, Antti. / Intercomparison of lateral scales of SEM and AFM microscopes in research institutes in Northern Europe. Espoo : Centre of Metrology and Accreditation, 2012. (MIKES Publication; No. J1/2012).
@book{897bb21dad124f0eb3cdede311bffd93,
title = "Intercomparison of lateral scales of SEM and AFM microscopes in research institutes in Northern Europe",
abstract = "An intercomparison (Nordic-nano1) of lateral scales of SEM and AFM microscopes in research institutes in Northern Europe. Grating samples (1D) were circulated among the participating laboratories. The laboratories were also asked about the calibration of their instruments. The results for both nominally 300 nm and 700 nm gratings show that a simple scale factor calibration would have corrected a large part of the deviations from the reference values. The accuracy of the uncertainty estimates varied between the laboratories, and for some laboratories the appropriateness of the calibration procedures could be considered.",
keywords = "interlaboratory comparison, calibration, latereal scales",
author = "Sepp{\"a}, {S. Jeremias} and Virpi Korpelainen and Sten Bergstrand and Helge Karlsson and Lauri Lillepea and Antti Lassila",
note = "CO:U SP Technical Research Institute of Sweden, Bor{\aa}s CO:U Justervesenet, Kjeller, Norway CO:U AS Metrosert, Tallinna CA2: MIKES AU2: Sepp{\"a}, S. Jeremias AU2: Korpelainen, Virpi AU2: Lassila, Antti",
year = "2012",
language = "English",
isbn = "978-952-5610-97-0 (PDF)",
series = "MIKES Publication",
publisher = "Centre of Metrology and Accreditation",
number = "J1/2012",
address = "Finland",

}

Seppä, SJ, Korpelainen, V, Bergstrand, S, Karlsson, H, Lillepea, L & Lassila, A 2012, Intercomparison of lateral scales of SEM and AFM microscopes in research institutes in Northern Europe. MIKES Publication, no. J1/2012, Centre of Metrology and Accreditation, Espoo.

Intercomparison of lateral scales of SEM and AFM microscopes in research institutes in Northern Europe. / Seppä, S. Jeremias; Korpelainen, Virpi; Bergstrand, Sten; Karlsson, Helge; Lillepea, Lauri; Lassila, Antti.

Espoo : Centre of Metrology and Accreditation, 2012. (MIKES Publication; No. J1/2012).

Research output: Book/ReportReport

TY - BOOK

T1 - Intercomparison of lateral scales of SEM and AFM microscopes in research institutes in Northern Europe

AU - Seppä, S. Jeremias

AU - Korpelainen, Virpi

AU - Bergstrand, Sten

AU - Karlsson, Helge

AU - Lillepea, Lauri

AU - Lassila, Antti

N1 - CO:U SP Technical Research Institute of Sweden, Borås CO:U Justervesenet, Kjeller, Norway CO:U AS Metrosert, Tallinna CA2: MIKES AU2: Seppä, S. Jeremias AU2: Korpelainen, Virpi AU2: Lassila, Antti

PY - 2012

Y1 - 2012

N2 - An intercomparison (Nordic-nano1) of lateral scales of SEM and AFM microscopes in research institutes in Northern Europe. Grating samples (1D) were circulated among the participating laboratories. The laboratories were also asked about the calibration of their instruments. The results for both nominally 300 nm and 700 nm gratings show that a simple scale factor calibration would have corrected a large part of the deviations from the reference values. The accuracy of the uncertainty estimates varied between the laboratories, and for some laboratories the appropriateness of the calibration procedures could be considered.

AB - An intercomparison (Nordic-nano1) of lateral scales of SEM and AFM microscopes in research institutes in Northern Europe. Grating samples (1D) were circulated among the participating laboratories. The laboratories were also asked about the calibration of their instruments. The results for both nominally 300 nm and 700 nm gratings show that a simple scale factor calibration would have corrected a large part of the deviations from the reference values. The accuracy of the uncertainty estimates varied between the laboratories, and for some laboratories the appropriateness of the calibration procedures could be considered.

KW - interlaboratory comparison

KW - calibration

KW - latereal scales

M3 - Report

SN - 978-952-5610-97-0 (PDF)

T3 - MIKES Publication

BT - Intercomparison of lateral scales of SEM and AFM microscopes in research institutes in Northern Europe

PB - Centre of Metrology and Accreditation

CY - Espoo

ER -

Seppä SJ, Korpelainen V, Bergstrand S, Karlsson H, Lillepea L, Lassila A. Intercomparison of lateral scales of SEM and AFM microscopes in research institutes in Northern Europe. Espoo: Centre of Metrology and Accreditation, 2012. (MIKES Publication; No. J1/2012).