@book{897bb21dad124f0eb3cdede311bffd93,
title = "Intercomparison of lateral scales of SEM and AFM microscopes in research institutes in Northern Europe",
abstract = "An intercomparison (Nordic-nano1) of lateral scales of SEM and AFM microscopes in research institutes in Northern Europe. Grating samples (1D) were circulated among the participating laboratories. The laboratories were also asked about the calibration of their instruments. The results for both nominally 300 nm and 700 nm gratings show that a simple scale factor calibration would have corrected a large part of the deviations from the reference values. The accuracy of the uncertainty estimates varied between the laboratories, and for some laboratories the appropriateness of the calibration procedures could be considered.",
keywords = "interlaboratory comparison, calibration, latereal scales",
author = "Sepp{\"a}, \{S. Jeremias\} and Virpi Korpelainen and Sten Bergstrand and Helge Karlsson and Lauri Lillepea and Antti Lassila",
year = "2012",
language = "English",
isbn = "978-952-5610-97-0",
series = "MIKES Publication",
publisher = "Centre of Metrology and Accreditation (MIKES)",
number = "J1/2012",
address = "Finland",
}