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Intercomparison of lateral scales of SEM and AFM microscopes in research institutes in Northern Europe
S. Jeremias Seppä
,
Virpi Korpelainen
, Sten Bergstrand
, Helge Karlsson
, Lauri Lillepea
,
Antti Lassila
RISE Research Institutes of Sweden
Norwegian Metrology Service
Metrosert AS
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INIS
scanning electron microscopy
100%
europe
100%
laboratories
100%
afm
100%
microscopes
100%
calibration
75%
gratings
50%
values
25%
accuracy
25%
Keyphrases
Northern Europe
100%
Grating
100%
Calibration Method
50%
Uncertainty Estimation
50%
Scale Calibration
50%
Earth and Planetary Sciences
Scanning Electron Microscopy
100%
Northern Europe
100%
Chemistry
Atomic Force Microscopy
100%
Scanning Electron Microscopy
100%
Neuroscience
Scanning Electron Microscopy
100%
Agricultural and Biological Sciences
Scanning Electron Microscopy
100%
Physics
Scanning Electron Microscopy
100%