Interface dissipation in piezoelectric MEMS resonators

An experimental and numerical investigation

A Frangi, M Cemonesi, Antti Jaakkola, Tuomas Pensala

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

Piezoelectrically actuated MEMS resonators can be very effective for timing applications even though experiments show that mode coupling and dissipative phenomena can affect their performance. Experiments demonstrate the occurrence of a much larger mechanical dissipation with respect to similar devices actuated capacitively. This contribution addresses the analysis of different dissipation phenomena. Refined numerical tools have shown that anchor and thermoelastic losses alone cannot reproduce experimental data. Hence a model to account for surface dissipation has been considered introducing a viscous term at the interfaces. A set of specific length extensional devices with different dimensions, vibrating modes and piezo-patterns have been produced and tested to validate the model. The numerical predictions show a good agreement with the experimental tests for different device lengths and actuation frequencies, confirming the initial assumption
Original languageEnglish
Title of host publicationProceedings of the IEEE SENSORS 2013
PublisherInstitute of Electrical and Electronic Engineers IEEE
Number of pages4
ISBN (Electronic)978-1-4673-4642-9
ISBN (Print)978-1-4673-4640-5
DOIs
Publication statusPublished - 2013
MoE publication typeA4 Article in a conference publication
EventIEEE SENSORS 2013 Conference - Baltimore, United States
Duration: 4 Nov 20136 Nov 2013

Conference

ConferenceIEEE SENSORS 2013 Conference
CountryUnited States
CityBaltimore
Period4/11/136/11/13

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microelectromechanical systems
dissipation
resonators
actuation
coupled modes
time measurement
occurrences
predictions

Cite this

Frangi, A., Cemonesi, M., Jaakkola, A., & Pensala, T. (2013). Interface dissipation in piezoelectric MEMS resonators: An experimental and numerical investigation. In Proceedings of the IEEE SENSORS 2013 [6688410] Institute of Electrical and Electronic Engineers IEEE. https://doi.org/10.1109/ICSENS.2013.6688410
Frangi, A ; Cemonesi, M ; Jaakkola, Antti ; Pensala, Tuomas. / Interface dissipation in piezoelectric MEMS resonators : An experimental and numerical investigation. Proceedings of the IEEE SENSORS 2013. Institute of Electrical and Electronic Engineers IEEE, 2013.
@inproceedings{1f9525454ec340a594d7737061281e52,
title = "Interface dissipation in piezoelectric MEMS resonators: An experimental and numerical investigation",
abstract = "Piezoelectrically actuated MEMS resonators can be very effective for timing applications even though experiments show that mode coupling and dissipative phenomena can affect their performance. Experiments demonstrate the occurrence of a much larger mechanical dissipation with respect to similar devices actuated capacitively. This contribution addresses the analysis of different dissipation phenomena. Refined numerical tools have shown that anchor and thermoelastic losses alone cannot reproduce experimental data. Hence a model to account for surface dissipation has been considered introducing a viscous term at the interfaces. A set of specific length extensional devices with different dimensions, vibrating modes and piezo-patterns have been produced and tested to validate the model. The numerical predictions show a good agreement with the experimental tests for different device lengths and actuation frequencies, confirming the initial assumption",
author = "A Frangi and M Cemonesi and Antti Jaakkola and Tuomas Pensala",
year = "2013",
doi = "10.1109/ICSENS.2013.6688410",
language = "English",
isbn = "978-1-4673-4640-5",
booktitle = "Proceedings of the IEEE SENSORS 2013",
publisher = "Institute of Electrical and Electronic Engineers IEEE",
address = "United States",

}

Frangi, A, Cemonesi, M, Jaakkola, A & Pensala, T 2013, Interface dissipation in piezoelectric MEMS resonators: An experimental and numerical investigation. in Proceedings of the IEEE SENSORS 2013., 6688410, Institute of Electrical and Electronic Engineers IEEE, IEEE SENSORS 2013 Conference, Baltimore, United States, 4/11/13. https://doi.org/10.1109/ICSENS.2013.6688410

Interface dissipation in piezoelectric MEMS resonators : An experimental and numerical investigation. / Frangi, A; Cemonesi, M; Jaakkola, Antti; Pensala, Tuomas.

Proceedings of the IEEE SENSORS 2013. Institute of Electrical and Electronic Engineers IEEE, 2013. 6688410.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Interface dissipation in piezoelectric MEMS resonators

T2 - An experimental and numerical investigation

AU - Frangi, A

AU - Cemonesi, M

AU - Jaakkola, Antti

AU - Pensala, Tuomas

PY - 2013

Y1 - 2013

N2 - Piezoelectrically actuated MEMS resonators can be very effective for timing applications even though experiments show that mode coupling and dissipative phenomena can affect their performance. Experiments demonstrate the occurrence of a much larger mechanical dissipation with respect to similar devices actuated capacitively. This contribution addresses the analysis of different dissipation phenomena. Refined numerical tools have shown that anchor and thermoelastic losses alone cannot reproduce experimental data. Hence a model to account for surface dissipation has been considered introducing a viscous term at the interfaces. A set of specific length extensional devices with different dimensions, vibrating modes and piezo-patterns have been produced and tested to validate the model. The numerical predictions show a good agreement with the experimental tests for different device lengths and actuation frequencies, confirming the initial assumption

AB - Piezoelectrically actuated MEMS resonators can be very effective for timing applications even though experiments show that mode coupling and dissipative phenomena can affect their performance. Experiments demonstrate the occurrence of a much larger mechanical dissipation with respect to similar devices actuated capacitively. This contribution addresses the analysis of different dissipation phenomena. Refined numerical tools have shown that anchor and thermoelastic losses alone cannot reproduce experimental data. Hence a model to account for surface dissipation has been considered introducing a viscous term at the interfaces. A set of specific length extensional devices with different dimensions, vibrating modes and piezo-patterns have been produced and tested to validate the model. The numerical predictions show a good agreement with the experimental tests for different device lengths and actuation frequencies, confirming the initial assumption

U2 - 10.1109/ICSENS.2013.6688410

DO - 10.1109/ICSENS.2013.6688410

M3 - Conference article in proceedings

SN - 978-1-4673-4640-5

BT - Proceedings of the IEEE SENSORS 2013

PB - Institute of Electrical and Electronic Engineers IEEE

ER -

Frangi A, Cemonesi M, Jaakkola A, Pensala T. Interface dissipation in piezoelectric MEMS resonators: An experimental and numerical investigation. In Proceedings of the IEEE SENSORS 2013. Institute of Electrical and Electronic Engineers IEEE. 2013. 6688410 https://doi.org/10.1109/ICSENS.2013.6688410