Interferometers for calibration of length standards

Antti Lassila, Erkki Ikonen, Kari Riski

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)

Abstract

Automated interferometers designed for calibration of gauge blocks and line scales are described. The gauge-block calibrator is a scanning interferometer with a white-light source and 633-nm He-Ne laser. The line-scale interferometer also uses a dynamic measurement method with a microscope and a CCD camera as the graduation line detector. The interferometers mainly use the same electronic units and meters for the environmental parameters. The combined standard uncertainty (1σ) is 52 nm for the gauge-block interferometer and 72 nm for the line-scale interferometer for 1-m steel standards.

Original languageEnglish
Pages (from-to)2619-2622
Number of pages4
JournalOptical Engineering
Volume34
Issue number9
DOIs
Publication statusPublished - 1 Jan 1995
MoE publication typeA1 Journal article-refereed

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