Interferometric length measurements

E. Ikonen, A. Lassila, J. Luukkainen, K. Riski

Research output: Contribution to journalArticle in a proceedings journalScientificpeer-review

3 Citations (Scopus)

Abstract

Automated interferometer equipments are described which can be used for calibration of gauge blocks and line scales with lengths up to 1000 mm. For the gauge blocks, the scanning measurement method utilizes a white-light source and one stabilized 633-nm laser. White-light interference signals from the reference flat and from the front surface of the gauge block mark the distance to be measured with the laser. The final length is determined from the laser-signal phase shifts between the gauge and the reference flat. Environmental conditions are measured and the necessary corrections are made automatically. The repeatability of the measurements is ± 3 nm for a 400-mm gauge block and the estimated relative uncertainty (1s) is about 10-7. The variation in length of the gauge block is obtained by computer-aided analysis of the digitized interference fringe patterns. For the line scales, a new measurement method has been developed which can utilize the same electronic units as used for gauge-block calibration: Images of the graduation lines replace the white-light interferences. The two fields constituting a video frame (image) are recorded by a moving microscope and by a ccd camera with 1-ms charging time interval. The exact distance between the microscope positions at the time of charging the ccd pixels is deduced from the interference and video synchronization signals. It is expected that a total uncertainty of about 100 nm for a 1000-mm scale will be reached.

Original languageEnglish
Pages (from-to)86-97
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume1756
DOIs
Publication statusPublished - 15 Feb 1993
MoE publication typeA4 Article in a conference publication
EventInterferometry: Applications 1992 - San Diego, United States
Duration: 22 Jul 1992 → …

Fingerprint

Gage blocks
Gauge
Interference
Light interference
interference
Laser
Lasers
Microscope
Microscopes
charging
Line
Calibration
Computer aided analysis
microscopes
lasers
Uncertainty
Phase shift
Repeatability
CCD Camera
Interferometers

Cite this

@article{a2e9e861aef5425ab2d732ede93790b7,
title = "Interferometric length measurements",
abstract = "Automated interferometer equipments are described which can be used for calibration of gauge blocks and line scales with lengths up to 1000 mm. For the gauge blocks, the scanning measurement method utilizes a white-light source and one stabilized 633-nm laser. White-light interference signals from the reference flat and from the front surface of the gauge block mark the distance to be measured with the laser. The final length is determined from the laser-signal phase shifts between the gauge and the reference flat. Environmental conditions are measured and the necessary corrections are made automatically. The repeatability of the measurements is ± 3 nm for a 400-mm gauge block and the estimated relative uncertainty (1s) is about 10-7. The variation in length of the gauge block is obtained by computer-aided analysis of the digitized interference fringe patterns. For the line scales, a new measurement method has been developed which can utilize the same electronic units as used for gauge-block calibration: Images of the graduation lines replace the white-light interferences. The two fields constituting a video frame (image) are recorded by a moving microscope and by a ccd camera with 1-ms charging time interval. The exact distance between the microscope positions at the time of charging the ccd pixels is deduced from the interference and video synchronization signals. It is expected that a total uncertainty of about 100 nm for a 1000-mm scale will be reached.",
author = "E. Ikonen and A. Lassila and J. Luukkainen and K. Riski",
year = "1993",
month = "2",
day = "15",
doi = "10.1117/12.140790",
language = "English",
volume = "1756",
pages = "86--97",
journal = "Proceedings of SPIE",
issn = "0277-786X",
publisher = "International Society for Optics and Photonics SPIE",

}

Interferometric length measurements. / Ikonen, E.; Lassila, A.; Luukkainen, J.; Riski, K.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 1756, 15.02.1993, p. 86-97.

Research output: Contribution to journalArticle in a proceedings journalScientificpeer-review

TY - JOUR

T1 - Interferometric length measurements

AU - Ikonen, E.

AU - Lassila, A.

AU - Luukkainen, J.

AU - Riski, K.

PY - 1993/2/15

Y1 - 1993/2/15

N2 - Automated interferometer equipments are described which can be used for calibration of gauge blocks and line scales with lengths up to 1000 mm. For the gauge blocks, the scanning measurement method utilizes a white-light source and one stabilized 633-nm laser. White-light interference signals from the reference flat and from the front surface of the gauge block mark the distance to be measured with the laser. The final length is determined from the laser-signal phase shifts between the gauge and the reference flat. Environmental conditions are measured and the necessary corrections are made automatically. The repeatability of the measurements is ± 3 nm for a 400-mm gauge block and the estimated relative uncertainty (1s) is about 10-7. The variation in length of the gauge block is obtained by computer-aided analysis of the digitized interference fringe patterns. For the line scales, a new measurement method has been developed which can utilize the same electronic units as used for gauge-block calibration: Images of the graduation lines replace the white-light interferences. The two fields constituting a video frame (image) are recorded by a moving microscope and by a ccd camera with 1-ms charging time interval. The exact distance between the microscope positions at the time of charging the ccd pixels is deduced from the interference and video synchronization signals. It is expected that a total uncertainty of about 100 nm for a 1000-mm scale will be reached.

AB - Automated interferometer equipments are described which can be used for calibration of gauge blocks and line scales with lengths up to 1000 mm. For the gauge blocks, the scanning measurement method utilizes a white-light source and one stabilized 633-nm laser. White-light interference signals from the reference flat and from the front surface of the gauge block mark the distance to be measured with the laser. The final length is determined from the laser-signal phase shifts between the gauge and the reference flat. Environmental conditions are measured and the necessary corrections are made automatically. The repeatability of the measurements is ± 3 nm for a 400-mm gauge block and the estimated relative uncertainty (1s) is about 10-7. The variation in length of the gauge block is obtained by computer-aided analysis of the digitized interference fringe patterns. For the line scales, a new measurement method has been developed which can utilize the same electronic units as used for gauge-block calibration: Images of the graduation lines replace the white-light interferences. The two fields constituting a video frame (image) are recorded by a moving microscope and by a ccd camera with 1-ms charging time interval. The exact distance between the microscope positions at the time of charging the ccd pixels is deduced from the interference and video synchronization signals. It is expected that a total uncertainty of about 100 nm for a 1000-mm scale will be reached.

UR - http://www.scopus.com/inward/record.url?scp=85075505653&partnerID=8YFLogxK

U2 - 10.1117/12.140790

DO - 10.1117/12.140790

M3 - Article in a proceedings journal

AN - SCOPUS:85075505653

VL - 1756

SP - 86

EP - 97

JO - Proceedings of SPIE

JF - Proceedings of SPIE

SN - 0277-786X

ER -