Interferometric Measurements of Dispersion Curves and Transmission Characteristics of the Acoustic Mirror in Thin Film BAW Resonator

Kimmo Kokkonen, Tuomas Pensala, Matti Kaivola

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

5 Citations (Scopus)

Abstract

A heterodyne laser interferometer is used for a detailed study of acoustic wave fields excited in a 932 MHz ZnO solidly mounted BAW resonator. The sample is manufactured onto a glass substrate, which allows for direct measurement of the vibration fields from the bottom of the mirror stack. The vibration fields are measured both on top of the resonator and at the bottom of the mirror stack. Dispersion curves are calculated from the experimental data in both cases. This enables comparison between the vibration amplitudes on top of the resonator with those at the bottom of the mirror stack, and hence allows to determine the transmission characteristics of the acoustic mirror within the measured wave-vector, frequency space. The experimental dispersion curves and mirror transmission are compared with simulations.
Original languageEnglish
Title of host publication2007 IEEE/MTT-S International Microwave Symposium
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages2071-2074
ISBN (Electronic)978-1-4244-0688-3
ISBN (Print)978-1-4244-0687-6
DOIs
Publication statusPublished - 2007
MoE publication typeA4 Article in a conference publication
EventIEEE/MTT-S International Microwave Symposium 2007 - Honolulu, HI, United States
Duration: 3 Jun 20078 Jun 2007

Publication series

SeriesIEEE MTT-S International Microwave Symposium
Volume2007
ISSN0149-645X

Conference

ConferenceIEEE/MTT-S International Microwave Symposium 2007
Country/TerritoryUnited States
CityHonolulu, HI
Period3/06/078/06/07

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