Interferometric step gauge for CMM verification

B. Hemming; V. P. Esala; P. Laukkanen; A. Rantanen; R. Viitala; T. Widmaier; P. Kuosmanen; A. Lassila

doi:10.1088/1361-6501/aabd2b

Interferometric step gauge for CMM verification

B. Hemming, V. P. Esala, P. Laukkanen, A. Rantanen, R. Viitala, T. Widmaier, P. Kuosmanen, A. Lassila

Aalto University

Research output: Contribution to journal › Article › Scientific › peer-review

4 Citations (Scopus)

Abstract

The verification of the measurement capability of coordinate measuring machines (CMM) is usually performed using gauge blocks or step gauges as reference standards. Gauge blocks and step gauges are robust and easy to use, but have some limitations such as finite lengths and uncertainty of thermal expansion. This paper describes the development, testing and uncertainty evaluation of an interferometric step gauge (ISG) for CMM verification. The idea of the ISG is to move a carriage bearing a gauge block along a rail and to measure the position with an interferometer. For a displacement of 1 m the standard uncertainty of the position of the gauge block is 0.2 μm. A short range periodic error of CMM can also be detected.

Original language	English
Article number	074012
Journal	Measurement Science and Technology
Volume	29
Issue number	7
DOIs	https://doi.org/10.1088/1361-6501/aabd2b
Publication status	Published - 7 Jun 2018
MoE publication type	A1 Journal article-refereed

Keywords

CMM
metrology
verification

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10.1088/1361-6501/aabd2b

Cite this

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title = "Interferometric step gauge for CMM verification",

abstract = "The verification of the measurement capability of coordinate measuring machines (CMM) is usually performed using gauge blocks or step gauges as reference standards. Gauge blocks and step gauges are robust and easy to use, but have some limitations such as finite lengths and uncertainty of thermal expansion. This paper describes the development, testing and uncertainty evaluation of an interferometric step gauge (ISG) for CMM verification. The idea of the ISG is to move a carriage bearing a gauge block along a rail and to measure the position with an interferometer. For a displacement of 1 m the standard uncertainty of the position of the gauge block is 0.2 μm. A short range periodic error of CMM can also be detected.",

keywords = "CMM, metrology, verification",

author = "B. Hemming and Esala, {V. P.} and P. Laukkanen and A. Rantanen and R. Viitala and T. Widmaier and P. Kuosmanen and A. Lassila",

note = "Funding Information: This work is part of the EMRP ENG56 Project {\textquoteleft}Drivetrain: traceable measurement of drive train components for renewable energy systems{\textquoteright} and was supported by the European Union within the European Metrology Research Program (EMRP). The EMRP is jointly funded by the EMRP participating countries within EURAMET and the European Union. The authors thank Mr Ville Byman for his help with data acquisition and analysis software and Dr Virpi Korpelainen for helpful discussions. Publisher Copyright: {\textcopyright} 2018 IOP Publishing Ltd. Copyright: Copyright 2018 Elsevier B.V., All rights reserved.",

year = "2018",

month = jun,

day = "7",

doi = "10.1088/1361-6501/aabd2b",

language = "English",

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journal = "Measurement Science and Technology",

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AU - Hemming, B.

AU - Esala, V. P.

AU - Laukkanen, P.

AU - Rantanen, A.

AU - Viitala, R.

AU - Widmaier, T.

AU - Kuosmanen, P.

AU - Lassila, A.

N1 - Funding Information: This work is part of the EMRP ENG56 Project ‘Drivetrain: traceable measurement of drive train components for renewable energy systems’ and was supported by the European Union within the European Metrology Research Program (EMRP). The EMRP is jointly funded by the EMRP participating countries within EURAMET and the European Union. The authors thank Mr Ville Byman for his help with data acquisition and analysis software and Dr Virpi Korpelainen for helpful discussions. Publisher Copyright: © 2018 IOP Publishing Ltd. Copyright: Copyright 2018 Elsevier B.V., All rights reserved.

PY - 2018/6/7

Y1 - 2018/6/7

N2 - The verification of the measurement capability of coordinate measuring machines (CMM) is usually performed using gauge blocks or step gauges as reference standards. Gauge blocks and step gauges are robust and easy to use, but have some limitations such as finite lengths and uncertainty of thermal expansion. This paper describes the development, testing and uncertainty evaluation of an interferometric step gauge (ISG) for CMM verification. The idea of the ISG is to move a carriage bearing a gauge block along a rail and to measure the position with an interferometer. For a displacement of 1 m the standard uncertainty of the position of the gauge block is 0.2 μm. A short range periodic error of CMM can also be detected.

AB - The verification of the measurement capability of coordinate measuring machines (CMM) is usually performed using gauge blocks or step gauges as reference standards. Gauge blocks and step gauges are robust and easy to use, but have some limitations such as finite lengths and uncertainty of thermal expansion. This paper describes the development, testing and uncertainty evaluation of an interferometric step gauge (ISG) for CMM verification. The idea of the ISG is to move a carriage bearing a gauge block along a rail and to measure the position with an interferometer. For a displacement of 1 m the standard uncertainty of the position of the gauge block is 0.2 μm. A short range periodic error of CMM can also be detected.

KW - CMM

KW - metrology

KW - verification

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DO - 10.1088/1361-6501/aabd2b

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AN - SCOPUS:85048952307

SN - 0957-0233

VL - 29

JO - Measurement Science and Technology

JF - Measurement Science and Technology

IS - 7

M1 - 074012

ER -

Interferometric step gauge for CMM verification

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Keywords

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