Intermodulation in capacitively coupled microelectromechanical filters

A.T. Alastalo, V. Kaajakari

    Research output: Contribution to journalArticleScientificpeer-review

    21 Citations (Scopus)


    A compact model for third-order intermodulation in capacitively coupled microelectromechanical filters is derived. A simple expression for the input third-order intercept point is given. This is valuable in designing micromechanical filters, for example, for communication applications. The validity of the analytic model is verified with numerical harmonic-balance simulations and experimental measurements.
    Original languageEnglish
    Pages (from-to)289-291
    Number of pages3
    JournalIEEE Electron Device Letters
    Issue number5
    Publication statusPublished - 2005
    MoE publication typeA1 Journal article-refereed


    • filters
    • intermodulation distortion
    • micromechanical devices
    • communication systems
    • filter distortion
    • microelectromechanical devices
    • microelectromechanical filters
    • third-order intermodulation


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