Intermodulation in capacitively coupled microelectromechanical filters

A.T. Alastalo, V. Kaajakari

Research output: Contribution to journalArticleScientificpeer-review

19 Citations (Scopus)


A compact model for third-order intermodulation in capacitively coupled microelectromechanical filters is derived. A simple expression for the input third-order intercept point is given. This is valuable in designing micromechanical filters, for example, for communication applications. The validity of the analytic model is verified with numerical harmonic-balance simulations and experimental measurements.
Original languageEnglish
Pages (from-to)289-291
Number of pages3
JournalIEEE Electron Device Letters
Issue number5
Publication statusPublished - 2005
MoE publication typeA1 Journal article-refereed


  • filters
  • intermodulation distortion
  • micromechanical devices
  • communication systems
  • filter distortion
  • microelectromechanical devices
  • microelectromechanical filters
  • third-order intermodulation

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