Abstract
A compact model for third-order intermodulation in capacitively coupled microelectromechanical filters is derived. A simple expression for the input third-order intercept point is given. This is valuable in designing micromechanical filters, for example, for communication applications. The validity of the analytic model is verified with numerical harmonic-balance simulations and experimental measurements.
| Original language | English |
|---|---|
| Pages (from-to) | 289-291 |
| Number of pages | 3 |
| Journal | IEEE Electron Device Letters |
| Volume | 26 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - 2005 |
| MoE publication type | A1 Journal article-refereed |
Keywords
- filters
- intermodulation distortion
- micromechanical devices
- communication systems
- filter distortion
- microelectromechanical devices
- microelectromechanical filters
- third-order intermodulation