Keyphrases
Nanoaperture
100%
Subwavelength Structures
100%
Focused Ion Beam Milling
66%
Quartz Substrate
66%
Induced Deposition
66%
Atomic Force Microscopy
33%
Scanning Electron Microscopy
33%
Dielectric
33%
Grating
33%
Tetraethyl Orthosilicate
33%
Device Structure
33%
Higher Index
33%
Device Modeling
33%
Annulus
33%
Aluminum Film
33%
Grating Pattern
33%
Plasmonic Nanogratings
33%
Focused Electron Beam
33%
Aluminum Layer
33%
Nanopost
33%
Device Geometry
33%
Periodic Annulus
33%
INIS
devices
100%
apertures
100%
substrates
33%
deposition
33%
ion beams
33%
quartz
33%
milling
33%
aluminum
33%
gratings
33%
layers
16%
geometry
16%
interfaces
16%
atomic force microscopy
16%
precursor
16%
scanning electron microscopy
16%
films
16%
accuracy
16%
periodicity
16%
dielectrics
16%
electron beams
16%
silicates
16%
Engineering
Focused Ion Beam
100%
Silicon Dioxide
100%
Processability
50%
Device Structure
50%
Plasmonics
50%
Atomic Force Microscopy
50%
Dielectrics
50%
Aluminum Film
50%
Material Science
Focused Ion Beam
100%
Aluminum
100%
Tetraethyl Orthosilicate
50%
Scanning Electron Microscopy
50%
Film
50%
Atomic Force Microscopy
50%
Dielectric Material
50%