Investigation of annealing behaviour of implanted nitrogen in InP by SIMS, NRB and RBS

Jari Likonen, K. Väkeväinen, T. Ahlgren, Jyrki Räisänen, Esko Rauhala, J. Keinonen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Original languageEnglish
    Title of host publicationSecondary ion mass spectrometry, SIMS X
    EditorsA. Benninghoven, B. Hagenhoff, H.W. Werner
    Place of PublicationChichester
    PublisherWiley
    Pages903-906
    ISBN (Print)978-0-471-95897-0
    Publication statusPublished - 1997
    MoE publication typeA4 Article in a conference publication
    Event10th International Conference on Secondary Ion Mass Spectrometry (SIMS X) - Münster, Germany
    Duration: 1 Oct 19956 Oct 1995

    Conference

    Conference10th International Conference on Secondary Ion Mass Spectrometry (SIMS X)
    CountryGermany
    CityMünster
    Period1/10/956/10/95

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