Investigation of annealing behaviour of implanted nitrogen in InP by SIMS, NRB and RBS

Jari Likonen; K. Väkeväinen; T. Ahlgren; Jyrki Räisänen; Esko Rauhala; J. Keinonen

Investigation of annealing behaviour of implanted nitrogen in InP by SIMS, NRB and RBS

Jari Likonen
, K. Väkeväinen
, T. Ahlgren
, Jyrki Räisänen
, Esko Rauhala
, J. Keinonen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Secondary ion mass spectrometry, SIMS X
Editors	A. Benninghoven, B. Hagenhoff, H.W. Werner
Place of Publication	Chichester
Publisher	Wiley
Pages	903-906
ISBN (Print)	978-0-471-95897-0
Publication status	Published - 1997
MoE publication type	A4 Article in a conference publication
Event	10th International Conference on Secondary Ion Mass Spectrometry (SIMS X) - Münster, Germany Duration: 1 Oct 1995 → 6 Oct 1995

Conference

Conference	10th International Conference on Secondary Ion Mass Spectrometry (SIMS X)
Country/Territory	Germany
City	Münster
Period	1/10/95 → 6/10/95

Cite this

@inproceedings{aef836787a114a62ae10ea51fc97ae20,

title = "Investigation of annealing behaviour of implanted nitrogen in InP by SIMS, NRB and RBS",

author = "Jari Likonen and K. V{\"a}kev{\"a}inen and T. Ahlgren and Jyrki R{\"a}is{\"a}nen and Esko Rauhala and J. Keinonen",

note = "Project code: KET4134 Poster; 10th International Conference on Secondary Ion Mass Spectrometry (SIMS X) ; Conference date: 01-10-1995 Through 06-10-1995",

year = "1997",

language = "English",

isbn = "978-0-471-95897-0",

pages = "903--906",

editor = "A. Benninghoven and B. Hagenhoff and H.W. Werner",

booktitle = "Secondary ion mass spectrometry, SIMS X",

publisher = "Wiley",

address = "United States",

}

Likonen, J, Väkeväinen, K, Ahlgren, T, Räisänen, J, Rauhala, E & Keinonen, J 1997, Investigation of annealing behaviour of implanted nitrogen in InP by SIMS, NRB and RBS. in A Benninghoven, B Hagenhoff & HW Werner (eds), Secondary ion mass spectrometry, SIMS X. Wiley, Chichester, pp. 903-906, 10th International Conference on Secondary Ion Mass Spectrometry (SIMS X), Münster, North Rhine-Westphalia, Germany, 1/10/95.

Investigation of annealing behaviour of implanted nitrogen in InP by SIMS, NRB and RBS. / Likonen, Jari; Väkeväinen, K.; Ahlgren, T. et al.
Secondary ion mass spectrometry, SIMS X. ed. / A. Benninghoven; B. Hagenhoff; H.W. Werner. Chichester: Wiley, 1997. p. 903-906.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Investigation of annealing behaviour of implanted nitrogen in InP by SIMS, NRB and RBS

AU - Likonen, Jari

AU - Väkeväinen, K.

AU - Ahlgren, T.

AU - Räisänen, Jyrki

AU - Rauhala, Esko

AU - Keinonen, J.

N1 - Project code: KET4134 Poster

PY - 1997

Y1 - 1997

M3 - Conference article in proceedings

SN - 978-0-471-95897-0

SP - 903

EP - 906

BT - Secondary ion mass spectrometry, SIMS X

A2 - Benninghoven, A.

A2 - Hagenhoff, B.

A2 - Werner, H.W.

PB - Wiley

CY - Chichester

T2 - 10th International Conference on Secondary Ion Mass Spectrometry (SIMS X)

Y2 - 1 October 1995 through 6 October 1995

ER -