Investigation of Si/SiO 2 bonding energy using recess test structure

INIS

• bonding 100%
• energy 100%
• investigations 100%
• silicon oxides 100%
• values 50%
• comparative evaluations 50%
• images 50%
• silicon 50%
• plasma 50%
• cracks 50%
• acoustics 50%
• microscopes 50%

Keyphrases

• Silica 100%
• Bond Energy 100%
• Silicon Wafer 50%
• Crack Opening 50%
• Scanning Acoustic Microscope 50%
• Microscope Image 50%
• Plasma-activated 50%

Engineering

• Test Structure 100%
• Crack Opening 50%
• Silicon Wafer 50%