Investigation of the annealing behaviour of implanted nitrogen in n-type InP

Jari Likonen, K. Väkeväinen, T. Ahlgren, Jyrki Räisänen, Esko Rauhala, J. Keinonen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Original languageEnglish
Title of host publicationIon Beam Modification of Materials
Subtitle of host publicationProceedings of the Ninth International Conference on Ion Beam Modification of Materials
EditorsJ.S. Williams, R.G. Elliman, M.C. Ridgway
PublisherElsevier
Pages891-894
ISBN (Print)978-0-444-82334-2
DOIs
Publication statusPublished - 1996
MoE publication typeA4 Article in a conference publication

Cite this

Likonen, J., Väkeväinen, K., Ahlgren, T., Räisänen, J., Rauhala, E., & Keinonen, J. (1996). Investigation of the annealing behaviour of implanted nitrogen in n-type InP. In J. S. Williams, R. G. Elliman, & M. C. Ridgway (Eds.), Ion Beam Modification of Materials: Proceedings of the Ninth International Conference on Ion Beam Modification of Materials (pp. 891-894). Elsevier. https://doi.org/10.1016/B978-0-444-82334-2.50175-1
Likonen, Jari ; Väkeväinen, K. ; Ahlgren, T. ; Räisänen, Jyrki ; Rauhala, Esko ; Keinonen, J. / Investigation of the annealing behaviour of implanted nitrogen in n-type InP. Ion Beam Modification of Materials: Proceedings of the Ninth International Conference on Ion Beam Modification of Materials. editor / J.S. Williams ; R.G. Elliman ; M.C. Ridgway. Elsevier, 1996. pp. 891-894
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author = "Jari Likonen and K. V{\"a}kev{\"a}inen and T. Ahlgren and Jyrki R{\"a}is{\"a}nen and Esko Rauhala and J. Keinonen",
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Likonen, J, Väkeväinen, K, Ahlgren, T, Räisänen, J, Rauhala, E & Keinonen, J 1996, Investigation of the annealing behaviour of implanted nitrogen in n-type InP. in JS Williams, RG Elliman & MC Ridgway (eds), Ion Beam Modification of Materials: Proceedings of the Ninth International Conference on Ion Beam Modification of Materials. Elsevier, pp. 891-894. https://doi.org/10.1016/B978-0-444-82334-2.50175-1

Investigation of the annealing behaviour of implanted nitrogen in n-type InP. / Likonen, Jari; Väkeväinen, K.; Ahlgren, T.; Räisänen, Jyrki; Rauhala, Esko; Keinonen, J.

Ion Beam Modification of Materials: Proceedings of the Ninth International Conference on Ion Beam Modification of Materials. ed. / J.S. Williams; R.G. Elliman; M.C. Ridgway. Elsevier, 1996. p. 891-894.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Investigation of the annealing behaviour of implanted nitrogen in n-type InP

AU - Likonen, Jari

AU - Väkeväinen, K.

AU - Ahlgren, T.

AU - Räisänen, Jyrki

AU - Rauhala, Esko

AU - Keinonen, J.

N1 - Project code: KET4134

PY - 1996

Y1 - 1996

U2 - 10.1016/B978-0-444-82334-2.50175-1

DO - 10.1016/B978-0-444-82334-2.50175-1

M3 - Conference article in proceedings

SN - 978-0-444-82334-2

SP - 891

EP - 894

BT - Ion Beam Modification of Materials

A2 - Williams, J.S.

A2 - Elliman, R.G.

A2 - Ridgway, M.C.

PB - Elsevier

ER -

Likonen J, Väkeväinen K, Ahlgren T, Räisänen J, Rauhala E, Keinonen J. Investigation of the annealing behaviour of implanted nitrogen in n-type InP. In Williams JS, Elliman RG, Ridgway MC, editors, Ion Beam Modification of Materials: Proceedings of the Ninth International Conference on Ion Beam Modification of Materials. Elsevier. 1996. p. 891-894 https://doi.org/10.1016/B978-0-444-82334-2.50175-1