Investigation of the annealing behaviour of implanted nitrogen in n-type InP

Jari Likonen, K. Väkeväinen, T. Ahlgren, Jyrki Räisänen, Esko Rauhala, J. Keinonen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Original languageEnglish
    Title of host publicationIon Beam Modification of Materials
    Subtitle of host publicationProceedings of the Ninth International Conference on Ion Beam Modification of Materials
    EditorsJ.S. Williams, R.G. Elliman, M.C. Ridgway
    PublisherElsevier
    Pages891-894
    ISBN (Print)978-0-444-82334-2
    DOIs
    Publication statusPublished - 1996
    MoE publication typeA4 Article in a conference publication

    Cite this

    Likonen, J., Väkeväinen, K., Ahlgren, T., Räisänen, J., Rauhala, E., & Keinonen, J. (1996). Investigation of the annealing behaviour of implanted nitrogen in n-type InP. In J. S. Williams, R. G. Elliman, & M. C. Ridgway (Eds.), Ion Beam Modification of Materials: Proceedings of the Ninth International Conference on Ion Beam Modification of Materials (pp. 891-894). Elsevier. https://doi.org/10.1016/B978-0-444-82334-2.50175-1