Investigation of the annealing behaviour of implanted nitrogen in n-type InP

Jari Likonen; K. Väkeväinen; T. Ahlgren; Jyrki Räisänen; Esko Rauhala; J. Keinonen

doi:10.1016/B978-0-444-82334-2.50175-1

Investigation of the annealing behaviour of implanted nitrogen in n-type InP

Jari Likonen, K. Väkeväinen, T. Ahlgren, Jyrki Räisänen, Esko Rauhala, J. Keinonen

University of Helsinki

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Ion Beam Modification of Materials
Subtitle of host publication	Proceedings of the Ninth International Conference on Ion Beam Modification of Materials
Editors	J.S. Williams, R.G. Elliman, M.C. Ridgway
Publisher	Elsevier
Pages	891-894
ISBN (Print)	978-0-444-82334-2
DOIs	https://doi.org/10.1016/B978-0-444-82334-2.50175-1
Publication status	Published - 1996
MoE publication type	A4 Article in a conference publication

Access to Document

10.1016/B978-0-444-82334-2.50175-1

Cite this

Likonen, J., Väkeväinen, K., Ahlgren, T., Räisänen, J., Rauhala, E., & Keinonen, J. (1996). Investigation of the annealing behaviour of implanted nitrogen in n-type InP. In J. S. Williams, R. G. Elliman, & M. C. Ridgway (Eds.), Ion Beam Modification of Materials: Proceedings of the Ninth International Conference on Ion Beam Modification of Materials (pp. 891-894). Elsevier. https://doi.org/10.1016/B978-0-444-82334-2.50175-1

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title = "Investigation of the annealing behaviour of implanted nitrogen in n-type InP",

author = "Jari Likonen and K. V{\"a}kev{\"a}inen and T. Ahlgren and Jyrki R{\"a}is{\"a}nen and Esko Rauhala and J. Keinonen",

note = "Project code: KET4134",

year = "1996",

doi = "10.1016/B978-0-444-82334-2.50175-1",

language = "English",

isbn = "978-0-444-82334-2",

pages = "891--894",

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publisher = "Elsevier",

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}

Likonen, J, Väkeväinen, K, Ahlgren, T, Räisänen, J, Rauhala, E & Keinonen, J 1996, Investigation of the annealing behaviour of implanted nitrogen in n-type InP. in JS Williams, RG Elliman & MC Ridgway (eds), Ion Beam Modification of Materials: Proceedings of the Ninth International Conference on Ion Beam Modification of Materials. Elsevier, pp. 891-894. https://doi.org/10.1016/B978-0-444-82334-2.50175-1

Investigation of the annealing behaviour of implanted nitrogen in n-type InP. / Likonen, Jari; Väkeväinen, K.; Ahlgren, T. et al.
Ion Beam Modification of Materials: Proceedings of the Ninth International Conference on Ion Beam Modification of Materials. ed. / J.S. Williams; R.G. Elliman; M.C. Ridgway. Elsevier, 1996. p. 891-894.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Investigation of the annealing behaviour of implanted nitrogen in n-type InP

AU - Likonen, Jari

AU - Väkeväinen, K.

AU - Ahlgren, T.

AU - Räisänen, Jyrki

AU - Rauhala, Esko

AU - Keinonen, J.

N1 - Project code: KET4134

PY - 1996

Y1 - 1996

U2 - 10.1016/B978-0-444-82334-2.50175-1

DO - 10.1016/B978-0-444-82334-2.50175-1

M3 - Conference article in proceedings

SN - 978-0-444-82334-2

SP - 891

EP - 894

BT - Ion Beam Modification of Materials

A2 - Williams, J.S.

A2 - Elliman, R.G.

A2 - Ridgway, M.C.

PB - Elsevier

ER -

Likonen J, Väkeväinen K, Ahlgren T, Räisänen J, Rauhala E, Keinonen J. Investigation of the annealing behaviour of implanted nitrogen in n-type InP. In Williams JS, Elliman RG, Ridgway MC, editors, Ion Beam Modification of Materials: Proceedings of the Ninth International Conference on Ion Beam Modification of Materials. Elsevier. 1996. p. 891-894 doi: 10.1016/B978-0-444-82334-2.50175-1