Investigation of the optimal processing parameters for picosecond laser-induced microfabrication of a polymer-ceramic hybrid material

Elli Käpylä (Corresponding Author), Sanna Turunen, Jani Pelto, Jouko Viitanen, Minna Kellomäki

Research output: Contribution to journalArticleScientificpeer-review

15 Citations (Scopus)

Abstract

This paper reports the effect of different process parameters on the resolution of direct laser writing by two-photon polymerization (2PP) with a low-cost Nd:YAG picosecond laser. Microstructures were fabricated from the hybrid polymer–ceramic material Ormocomp® and the impact of varying the laser beam focus position, average laser power and scanning speed were investigated in detail with scanning electron microscopy and atomic force microscopy imaging. With the appropriate laser beam focus settings, suspended structures could be fabricated. The laser intensity range of the so-called polymerization window and damage zone are reported along with the scanning speed range for producing uniform polymer lines. It is shown that very high resolution is achievable with this affordable picosecond laser 2PP system with feature sizes comparable to those previously reported for costly femtosecond laser systems. The discovered relationships between the process parameters and structure dimensions enable the design and fabrication of both 3D microstructures and nanometer scale surface features.
Original languageEnglish
Article number065033
JournalJournal of Micromechanics and Microengineering
Volume21
Issue number6
DOIs
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed

Fingerprint

Microfabrication
Hybrid materials
Ceramic materials
Polymers
Lasers
Processing
Laser beams
Polymerization
Scanning
Microstructure
Ultrashort pulses
Atomic force microscopy
Photons
Imaging techniques
Fabrication
Scanning electron microscopy
Costs

Keywords

  • Nd:YAG picosecond laser
  • two-photon polymerization
  • 3D microstructures
  • machine vision
  • microstructures
  • ProperPart

Cite this

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title = "Investigation of the optimal processing parameters for picosecond laser-induced microfabrication of a polymer-ceramic hybrid material",
abstract = "This paper reports the effect of different process parameters on the resolution of direct laser writing by two-photon polymerization (2PP) with a low-cost Nd:YAG picosecond laser. Microstructures were fabricated from the hybrid polymer–ceramic material Ormocomp{\circledR} and the impact of varying the laser beam focus position, average laser power and scanning speed were investigated in detail with scanning electron microscopy and atomic force microscopy imaging. With the appropriate laser beam focus settings, suspended structures could be fabricated. The laser intensity range of the so-called polymerization window and damage zone are reported along with the scanning speed range for producing uniform polymer lines. It is shown that very high resolution is achievable with this affordable picosecond laser 2PP system with feature sizes comparable to those previously reported for costly femtosecond laser systems. The discovered relationships between the process parameters and structure dimensions enable the design and fabrication of both 3D microstructures and nanometer scale surface features.",
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year = "2011",
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language = "English",
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journal = "Journal of Micromechanics and Microengineering",
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Investigation of the optimal processing parameters for picosecond laser-induced microfabrication of a polymer-ceramic hybrid material. / Käpylä, Elli (Corresponding Author); Turunen, Sanna; Pelto, Jani; Viitanen, Jouko; Kellomäki, Minna.

In: Journal of Micromechanics and Microengineering, Vol. 21, No. 6, 065033, 2011.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Investigation of the optimal processing parameters for picosecond laser-induced microfabrication of a polymer-ceramic hybrid material

AU - Käpylä, Elli

AU - Turunen, Sanna

AU - Pelto, Jani

AU - Viitanen, Jouko

AU - Kellomäki, Minna

N1 - Project code: 19825

PY - 2011

Y1 - 2011

N2 - This paper reports the effect of different process parameters on the resolution of direct laser writing by two-photon polymerization (2PP) with a low-cost Nd:YAG picosecond laser. Microstructures were fabricated from the hybrid polymer–ceramic material Ormocomp® and the impact of varying the laser beam focus position, average laser power and scanning speed were investigated in detail with scanning electron microscopy and atomic force microscopy imaging. With the appropriate laser beam focus settings, suspended structures could be fabricated. The laser intensity range of the so-called polymerization window and damage zone are reported along with the scanning speed range for producing uniform polymer lines. It is shown that very high resolution is achievable with this affordable picosecond laser 2PP system with feature sizes comparable to those previously reported for costly femtosecond laser systems. The discovered relationships between the process parameters and structure dimensions enable the design and fabrication of both 3D microstructures and nanometer scale surface features.

AB - This paper reports the effect of different process parameters on the resolution of direct laser writing by two-photon polymerization (2PP) with a low-cost Nd:YAG picosecond laser. Microstructures were fabricated from the hybrid polymer–ceramic material Ormocomp® and the impact of varying the laser beam focus position, average laser power and scanning speed were investigated in detail with scanning electron microscopy and atomic force microscopy imaging. With the appropriate laser beam focus settings, suspended structures could be fabricated. The laser intensity range of the so-called polymerization window and damage zone are reported along with the scanning speed range for producing uniform polymer lines. It is shown that very high resolution is achievable with this affordable picosecond laser 2PP system with feature sizes comparable to those previously reported for costly femtosecond laser systems. The discovered relationships between the process parameters and structure dimensions enable the design and fabrication of both 3D microstructures and nanometer scale surface features.

KW - Nd:YAG picosecond laser

KW - two-photon polymerization

KW - 3D microstructures

KW - machine vision

KW - microstructures

KW - ProperPart

U2 - 10.1088/0960-1317/21/6/065033

DO - 10.1088/0960-1317/21/6/065033

M3 - Article

VL - 21

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

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