Ion beam mixing of Au marker in Pt and Pt marker by 7 MeV Ag ions

Jari Likonen, Mikko Hautala, Ilkka Koponen

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    Mixing of a thin Au layer in Pt and in reversed conditions mixing of a thin Pt layer in Au due to bombardment with 7 MeV Ag ions has been measured. The Pt-Au multilayers deposited on a Si substrate were irradiated to doses of 1–6 × 1015 ions cm−2 at room temperature. The mixed profiles were measured using a SIMS apparatus with O2+ sputter ions at energy 2.5 keV. The width of the Pt marker increased from 90 to 260 Å with increasing dose. The width of the Au marker increased from 80 to 90 Å, respectively. The corresponding mixing efficiencies are 5 ± 3 (Au marker) and 90 ± 30 Å5/eV (Pt marker). The experimental results are compared with simulations based on a model which describes the atomic transport from the initial collisional phase to the late thermalized stage. The calculated values for mixing efficiencies agree reasonably well with experimental values.
    Original languageEnglish
    Pages (from-to)429-432
    Number of pages4
    JournalNuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Issue number1-4
    Publication statusPublished - 1994
    MoE publication typeA1 Journal article-refereed


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