Ion beam mixing of Au marker in Pt and Pt marker by 7 MeV Ag ions

Jari Likonen, Mikko Hautala, Ilkka Koponen

    Research output: Contribution to journalArticleScientificpeer-review

    3 Citations (Scopus)

    Abstract

    Mixing of a thin Au layer in Pt and in reversed conditions mixing of a thin Pt layer in Au due to bombardment with 7 MeV Ag ions has been measured. The Pt-Au multilayers deposited on a Si substrate were irradiated to doses of 1–6 × 1015 ions cm−2 at room temperature. The mixed profiles were measured using a SIMS apparatus with O2+ sputter ions at energy 2.5 keV. The width of the Pt marker increased from 90 to 260 Å with increasing dose. The width of the Au marker increased from 80 to 90 Å, respectively. The corresponding mixing efficiencies are 5 ± 3 (Au marker) and 90 ± 30 Å5/eV (Pt marker). The experimental results are compared with simulations based on a model which describes the atomic transport from the initial collisional phase to the late thermalized stage. The calculated values for mixing efficiencies agree reasonably well with experimental values.
    Original languageEnglish
    Pages (from-to)429-432
    Number of pages4
    JournalNuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Volume90
    Issue number1-4
    DOIs
    Publication statusPublished - 1994
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    markers
    Ion beams
    ion beams
    Ions
    ions
    dosage
    Secondary ion mass spectrometry
    secondary ion mass spectrometry
    bombardment
    Multilayers
    room temperature
    Substrates
    profiles
    simulation
    Temperature
    energy

    Cite this

    @article{0d21ad5f25694482bd21f9de28499276,
    title = "Ion beam mixing of Au marker in Pt and Pt marker by 7 MeV Ag ions",
    abstract = "Mixing of a thin Au layer in Pt and in reversed conditions mixing of a thin Pt layer in Au due to bombardment with 7 MeV Ag ions has been measured. The Pt-Au multilayers deposited on a Si substrate were irradiated to doses of 1–6 × 1015 ions cm−2 at room temperature. The mixed profiles were measured using a SIMS apparatus with O2+ sputter ions at energy 2.5 keV. The width of the Pt marker increased from 90 to 260 {\AA} with increasing dose. The width of the Au marker increased from 80 to 90 {\AA}, respectively. The corresponding mixing efficiencies are 5 ± 3 (Au marker) and 90 ± 30 {\AA}5/eV (Pt marker). The experimental results are compared with simulations based on a model which describes the atomic transport from the initial collisional phase to the late thermalized stage. The calculated values for mixing efficiencies agree reasonably well with experimental values.",
    author = "Jari Likonen and Mikko Hautala and Ilkka Koponen",
    note = "Project code: ket 41383",
    year = "1994",
    doi = "10.1016/0168-583X(94)95587-5",
    language = "English",
    volume = "90",
    pages = "429--432",
    journal = "Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",
    issn = "0168-583X",
    publisher = "Elsevier",
    number = "1-4",

    }

    Ion beam mixing of Au marker in Pt and Pt marker by 7 MeV Ag ions. / Likonen, Jari; Hautala, Mikko; Koponen, Ilkka.

    In: Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vol. 90, No. 1-4, 1994, p. 429-432.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Ion beam mixing of Au marker in Pt and Pt marker by 7 MeV Ag ions

    AU - Likonen, Jari

    AU - Hautala, Mikko

    AU - Koponen, Ilkka

    N1 - Project code: ket 41383

    PY - 1994

    Y1 - 1994

    N2 - Mixing of a thin Au layer in Pt and in reversed conditions mixing of a thin Pt layer in Au due to bombardment with 7 MeV Ag ions has been measured. The Pt-Au multilayers deposited on a Si substrate were irradiated to doses of 1–6 × 1015 ions cm−2 at room temperature. The mixed profiles were measured using a SIMS apparatus with O2+ sputter ions at energy 2.5 keV. The width of the Pt marker increased from 90 to 260 Å with increasing dose. The width of the Au marker increased from 80 to 90 Å, respectively. The corresponding mixing efficiencies are 5 ± 3 (Au marker) and 90 ± 30 Å5/eV (Pt marker). The experimental results are compared with simulations based on a model which describes the atomic transport from the initial collisional phase to the late thermalized stage. The calculated values for mixing efficiencies agree reasonably well with experimental values.

    AB - Mixing of a thin Au layer in Pt and in reversed conditions mixing of a thin Pt layer in Au due to bombardment with 7 MeV Ag ions has been measured. The Pt-Au multilayers deposited on a Si substrate were irradiated to doses of 1–6 × 1015 ions cm−2 at room temperature. The mixed profiles were measured using a SIMS apparatus with O2+ sputter ions at energy 2.5 keV. The width of the Pt marker increased from 90 to 260 Å with increasing dose. The width of the Au marker increased from 80 to 90 Å, respectively. The corresponding mixing efficiencies are 5 ± 3 (Au marker) and 90 ± 30 Å5/eV (Pt marker). The experimental results are compared with simulations based on a model which describes the atomic transport from the initial collisional phase to the late thermalized stage. The calculated values for mixing efficiencies agree reasonably well with experimental values.

    U2 - 10.1016/0168-583X(94)95587-5

    DO - 10.1016/0168-583X(94)95587-5

    M3 - Article

    VL - 90

    SP - 429

    EP - 432

    JO - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

    JF - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

    SN - 0168-583X

    IS - 1-4

    ER -