Mixing of a thin Au layer in Pt and in reversed conditions mixing of a thin Pt layer in Au due to bombardment with 7 MeV Ag ions has been measured. The Pt-Au multilayers deposited on a Si substrate were irradiated to doses of 1–6 × 1015 ions cm−2 at room temperature. The mixed profiles were measured using a SIMS apparatus with O2+ sputter ions at energy 2.5 keV. The width of the Pt marker increased from 90 to 260 Å with increasing dose. The width of the Au marker increased from 80 to 90 Å, respectively. The corresponding mixing efficiencies are 5 ± 3 (Au marker) and 90 ± 30 Å5/eV (Pt marker). The experimental results are compared with simulations based on a model which describes the atomic transport from the initial collisional phase to the late thermalized stage. The calculated values for mixing efficiencies agree reasonably well with experimental values.
|Number of pages||4|
|Journal||Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms|
|Publication status||Published - 1994|
|MoE publication type||A1 Journal article-refereed|